Abstract:Single-layer graphene has been proved to be an ideal material for broadband high-speed photodetector. However, the pure graphene photodetector photoresponsivity is limited to tens of mA/W by the low optical absorption and short exciton life of graphene. When higher responsivity is needed, the graphene layer needs to be coupled with other materials, e.g., Titanium Dioxide (TiO2). Conventional TiO2 recipes require either solution or high temperature which tends to destruct the graphene layer. In this work, TiO2 is synthesized by oxygen plasma treating Ti film. This novel synthesis route of TiO2 avoids defects introduced by the conventional recipes. The hybrid device shows a high photoresponsivity of ~ 179 A/W, a fast response time of ~ 20 ms and a specific detectivity of ~ 9.12 × 109 Jones with the incident light intensity of sub-microwatt. Under the illumination, the photon absorption in graphene creates electron–hole pairs, which were separated at TiO2/graphene interface by an internal electric field and corresponding electrons transfer from the graphene to TiO2 layer. The high photoresponsivity is attributed to the long lifetime of the photoexcited charge carriers caused by a built-in field at the interface of TiO2/graphene. Our research provides an effective method to improve the photoresponse of the graphene-based photodetector. In addition, our TiO2 recipe could be applied in the fabrication of other electronic devices where solution or high temperature processes are difficult.

Effect of Oxygen Plasma on the Optical Properties of Monolayer Graphene

Tunable Optical Absorption And Interactions In Graphene Via Oxygen Plasma

Optical study of few‐layer graphene treated by oxygen plasma

Effect of Oxygen Plasma Treatment on the Structure and Mechanical Properties of Bilayer Graphene Studied by Molecular Dynamics Simulation

Anomalous Photoresponse in the Deep-Ultraviolet Due to Resonant Excitonic Effects in Oxygen Plasma Treated Few-Layer Graphene

Enhanced thermopower of graphene films with oxygen plasma treatment.

The Role of the Oxygen Impurity on the Electronic Properties of Monolayer Graphene: A Density-Functional Study

Reduction of Graphene Oxide Via Plasma Immersion Ion Implantation

Temperature-Dependent Optical Properties of Oxidized Graphenes

Facile Oxygen Intercalation Between Full Layer Graphene and Ru(0001) under Ambient Conditions

Oxygen ion irradiation: Insights into the structural modifications of CVD-grown graphene

Probing the Thermal Deoxygenation of Graphene Oxide using High Resolution In Situ X-Ray based Spectroscopies

Electronic structure and optical properties of Graphene Monoxide

Tuning properties of graphene by oxygen plasma treatment-induced defect engineering

Fluorinating the graphene-like BeO monolayer: A spin-polarized first principles study of the electronic, magnetic and optical properties

Diffusion and Desorption of Oxygen Atoms on Graphene

Spectroscopic Ellipsometry on Si/SiO2/graphene Tri-Layer System Exposed to Downstream Hydrogen Plasma: Effects of Hydrogenation and Chemical Sputtering

Influences of CO2 Laser Modification on the Surface Morphology and Optical Absorption of Graphene Thin Films

Structural and Electronic Properties of Oxidized Graphene

Band Structure of Plasmons and Optical Absorption Enhancement in Graphene on Subwavelength Dielectric Gratings at Infrared Frequencies

Modification of graphene photodetector by TiO2 prepared by oxygen plasma