Microfabrication of A Planar Helix with Straight-Edge Connections Slow-Wave Structure

Ciersiang Chua,Julius Tsai,Min Tang,Sheel Aditya,Zhongxiang Shen
DOI: https://doi.org/10.4028/www.scientific.net/amr.254.17
2011-01-01
Advanced Materials Research
Abstract:A 100GHz planar helix with straight-edge connections slow-wave structure incorporating coplanar waveguide feed has been designed and fabricated. The proposed fabrication process can produce high-aspect-ratio planar helical structures which is essential for sheet electron beam traveling-wave tube application. The photoresists used in this process can be easily stripped after electroplating of three-dimensional structures.
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