Abstract:Direct-write multi-photon laser lithography (MPL) combines highest resolution on the nanoscale with essentially unlimited 3D design freedom. Over the previous years, the groundbreaking potential of this technique has been demonstrated in various application fields, including micromechanics, material sciences, microfluidics, life sciences as well as photonics, where in-situ printed optical coupling elements offer new perspectives for package-level system integration. However, millimeter-wave (mmW) and terahertz (THz) devices could not yet leverage the unique strengths of MPL, even though the underlying devices and structures could also greatly benefit from 3D freeform microfabrication. One of the key challenges in this context is the fact that functional mmW and THz structures require materials with high electrical conductivity and low dielectric losses, which are not amenable to structuring by multi-photon polymerization. In this work, we introduce and experimentally demonstrate a novel approach that allows to leverage MPL for fabricating high-performance mmW and THz structures with hitherto unachieved functionalities. Our concept exploits in-situ printed polymer templates that are selectively coated through highly directive metal deposition techniques in combination with precisely aligned 3D-printed shadowing structures. The resulting metal-coated freeform structures offer high surface quality in combination with low dielectric losses and conductivities comparable to bulk material values, while lending themselves to fabrication on planar mmW/THz circuits. We experimentally show the viability of our concept by demonstrating a series of functional THz structures such as THz interconnects, probe tips, and suspended antennas. We believe that our approach offers disruptive potential in the field of mmW and THz technology and may unlock an entirely new realm of laser-based 3D manufacturing.

High-throughput Microfabrication of Axially Tunable Helices

Rapid Microfabrication of Helical Structures for Industrial Applications

Multiple-Patterning Nanosphere Lithography for Fabricating Periodic Three-Dimensional Hierarchical Nanostructures.

High-Throughput Volumetric Microfabrication with Structured Light

Fabrication of Chiral 3D Microstructure Using Tightly Focused Multiramp Helico-Conical Optical Beams

A New Diamond Machining Approach for Extendable Fabrication of Micro-Freeform Lens Array

High-Throughput and Controllable Fabrication of Helical Microfibers by Hydrodynamically Focusing Flow.

Controllable Double-Helical Microstructures by Photonic Orbital Angular Momentum for Chiroptical Response

High Depth-of-Field Nanostructures by Rotational Near-Field Photolithography

Fabrication of High-Aspect-ratio Structures Using Bessel-beam-activated Photopolymerization

Rapid Fabrication of 3D Chiral Microstructures by Single Exposure of Interfered Femtosecond Vortex Beams and Capillary‐Force‐Assisted Self‐Assembly

Numerical Model of Jet Formation During Melt Electrowriting for Fabrication of Precise Structures

Patterned Microstructure Array Fabrication By Using A Novel Standing Surface Acoustic Wave Device

Fabrication of Double-Helix Microstructures by Two-Photon Polymerization

Flexible 3-D Helix Fabrication by In-Situ SEM Micromanipulation System

Fabrication of Micro/Nano Dual Needle Structures with Morphological Gradient Based on Two-Photon Polymerization Laser Direct Writing with Proactive Focus Compensation

Fabricating SU-8 Photoresist Microstructures with Controlled Convexity–Concavity and Curvature through Thermally Manipulating Capillary Action in Poly(dimethylsiloxane) Microholes

Rotational multimaterial printing of filaments with subvoxel control

Freeform terahertz structures fabricated by multi-photon lithography and metal coating

Shaping Nanoscale Ribbons into Microhelices of Controllable Radius and Pitch

Generation of Tailored Multi-Material Microstructures Through One-Step Direct Laser Writing