Abstract:With the advancement of micro/nanotechnology, precise control of the interaction between light and matter at the micro/nanoscale is crucial for successful material processing and surface functionalization. Ultrafast lasers with ultra-short pulses have gained attention due to their high spatial resolution and low thermal damage, enabling extremely smooth and precise machining on various metal surfaces. At the same time, shorter pulse nanosecond lasers, which have a wider application range, strike a balance between achieving high-precision microfabrication and mitigating adverse thermal effects caused by millisecond lasers. By adjusting laser processing parameters, it is possible to create large-scale micro/nanostructures with complex shapes, delicate textures, and special functionalities, applicable in fields such as optics, electronics, and biomedicine. Short/ultrafast pulse laser fabrication technology opens up more possibilities and prospects for the realization of diverse functional micro/nanostructures. This comprehensive review provides an overview of the interaction mechanisms between short/ultra-short-pulse laser micro/nanoprocessing and materials. By integrating theoretical models such as the two-temperature model and the Drude–Lorentz model, along with comprehensive numerical simulation methods, a brief summary of the ablation behavior of metal surfaces under short/ultra-short-pulse lasers is provided. Furthermore, we delve into the controllability of microstructures, laser-induced periodic surface structures at the nanoscale, and other types of nanostructures under different processing conditions. Thorough analysis and discussion are conducted from multiple perspectives, including surface topography and functional impacts. Subsequently, the focus shifts to the functionalization of metal surfaces with micro/nanostructures, and an in-depth investigation and review are conducted in areas such as surface wettability, bio-inspired surfaces, optical diffraction, and advanced biomedicine. Finally, the advantages and limitations of laser texturing processing techniques are discussed, and the future development of functionalized metal surfaces is anticipated.

Material Behavior under Extreme Domain Constraint in Laser-Assisted Surface Nanostructuring

Stress waves in laser-material interaction: From atomistic understanding to nanoscale characterization

Effects of Laser Fluence on Near-Field Surface Nanostructuring

Laser machining fundamentals: micro, nano, atomic and close-to-atomic scales

Controllable fabrication of Sub-20nm structures with coupling field tip enhancement effect induced by nanosecond pulsed laser irradiation

Advances in ultrafast laser structuring of materials at the nanoscale

Atomic‐Level Insight into the Formation of Subsurface Dislocation Layer and Its Effect on Mechanical Properties During Ultrafast Laser Micro/Nano Fabrication

Recent Findings on the Mechanical Responses of Nanostructures to Extreme Loading Conditions

Localized In-Situ Deposition: a New Dimension to Control in Fabricating Surface Micro/nano Structures Via Ultrafast Laser Ablation

AFM Tip-Based Fabrication of Silicon Nanostructures with Reduced Subsurface Amorphous Layers

Hybrid Atomistic-Macroscale Modeling of Long-Time Phase Change in Nanosecond Laser–material Interaction

Study for Laser Controlled Fabrication of Micro/Nano-Structures of Silicon Based on Multi-Physics Model

Advanced mechanism of multiphysics fields tip enhancement induced with varied laser power to fabricate pattern-transformable subdiffraction limit nanostructures

Nanofabrication mechanism of λ/20 features achieved by coupling field tip enhancement induced with nanosecond laser irradiating AFM probe tip

Real-space observation of surface structuring induced by ultra-fast-laser illumination far below the melting threshold

Mechanical and surface characteristics in laser-assisted machining of NiFeCr alloy: An atomic-scale understanding

Micro/nanoengineering of functionalized metal surfaces based on short/ultra-short-pulsed lasers: a review

Hybrid atomistic-macroscale modeling of long-time material behavior in nanosecond laser-material interaction

Nanoparticle Structure Evolution under Picosecond Laser-Induced Stress Wave Compression

Femtosecond Laser-Induced Evolution of Surface Micro-Structure in Depth Direction of Nickel-Based Alloy

Micro/Nano Periodic Surface Structures and Performance of Stainless Steel Machined Using Femtosecond Lasers