Abstract:Three-dimensional packaging technology is an important way to break through the limit of Moore's law and achieving high-density interconnection of components in three-dimensional integrated circuits. Li2O-Al2O3-SiO2 photosensitive glass-ceramics, as a transfer plate material, have become a research hotspot compared to silicon- based materials and ceramic materials due to their advantages, such as adjustable thermal expansion and low process complexity. The nucleating agent is a key material in the preparation of photosensitive glass-ceramics, but there is still a lack of sufficient research on how it affects the crystallization process of glass, especially at the microscopic or even atomic-scale. Here, the author uses the first-principles method to calculate the intrinsic physical properties of Li2SiO3. The differences in the radial distribution functions of amorphous Li2SiO3 and Ag-Li2SiO3 are discussed using the molecular dynamics method. The results show that the distribution of elements in Li2SiO3 is more likely to be crystalline under the action of Ag-cluster. Additionally, the diffusion coefficients of Li ions in amorphous Li(2)SiO(3 )and Ag-Li2SiO3 are 5.83 x 10(-6) and 0.12 x 10(-6) cm(2)/s, respectively, indicating that Ag, as a nucleating agent, can reduce the diffusion rate of ions in Li2SiO3. This means that Ag can promote the transformation of Li2SiO3 from amorphous state to crystalline state, facilitating the crystallization process of photosensitive glass-ceramics. High-throughput molecular dynamics combined with experimental validation is used, which provides a new perspective for the study of photosensitive glass-ceramics as transfer plate materials.

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