High Precision Phase Measuring Profilometry Based on Stereo Microscope

Yuankun Liu,Xianyu Su
DOI: https://doi.org/10.1016/j.ijleo.2014.07.057
IF: 3.1
2014-01-01
Optik
Abstract:A high-precision phase measuring profilometry (PMP) based on a stereo microscope is presented. A high-quality area modulation sinusoidal grating by a LED illumination is used to produce the high-quality sinusoidal fringes. Phase-shift technique is employed to get the phase distributions, and the 3D data could be reconstructed by the phase-height mapping algorithm easily. The accuracy depends on the field of view, which at a large magnification is below 1μm. This setup will be promising for high accuracy measurement task.
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