Design and implementation of shape memory alloy-actuated nanotweezers for nanoassembly

hao zhao,ming chang,xiaojun liu,jacque lynn gabayno,hsieh tsun chen
DOI: https://doi.org/10.1088/0960-1317/24/9/095012
2014-01-01
Journal of Micromechanics and Microengineering
Abstract:Reliable and accurate tools for nanoscale manipulation are constantly sought to complement new breakthroughs in nanomaterials and nanotechnology. In this study, a new design of electrically actuated nanotweezers was developed for manipulation of individual nanowires. The design featured two chemically etched tungsten tips attached to a carbon fiber-reinforced polymer and two shape memory alloy actuators. The shape recovery effect of the spring actuators was exploited as a control mechanism for the bending and relaxation modes of the nanotweezers. This was activated by driving a potential difference of less than 1 V across the coils, which was considerably lower than for electromechanical micro/nanotweezers previously developed. To demonstrate the pick-and-place capability of the system, experiments were implemented inside the vacuum chamber of a JEOL-JSM 6300 SEM. Individual Au nanowires averaging 5-10 mu m in length and 200 nm in diameter were assembled on silicon substrates using the tungsten tips to draw initials out of various nanowire shapes such as curls, loops, crosses, and zigzags. With such capability, the nanotweezers may find applications in the manufacturing of complex nanostructures or modification of surface properties of materials.
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