Metal Nanoparticle Direct Inkjet Printing for Low-Temperature 3D Micro Metal Structure Fabrication

Seung Hwan Ko,Jaewon Chung,Nico Hotz,Koo Hyun Nam,Costas P. Grigoropoulos
DOI: https://doi.org/10.1088/0960-1317/20/12/125010
2010-01-01
Journal of Micromechanics and Microengineering
Abstract:Inkjet printing of functional materials is a key technology toward ultra-low-cost, large-area electronics. We demonstrate low-temperature 3D micro metal structure fabrication by direct inkjet printing of metal nanoparticles (NPs) as a versatile, direct 3D metal structuring approach representing an alternative to conventional vacuum deposition and photolithographic methods. Metal NP ink was inkjet-printed to exploit the large melting temperature drop of the nanomaterial and the ease of the NP ink formulation. Parametric studies on the basic conditions for stable 3D inkjet printing of NP ink were carried out. Furthermore, diverse 3D metal microstructures, including micro metal pillar arrays, helices, zigzag and micro bridges were demonstrated and electrical characterization was performed. Since the process requires low temperature, it carries substantial potential for fabrication of electronics on a plastic substrate.
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