Regularly-formed Three-Dimensional Gold Nanodot Array with Controllable Optical Properties

Zhenxing Li,Masahiko Yoshino,Akinori Yamanaka

DOI: https://doi.org/10.1088/0960-1317/24/4/045011

2014-01-01

Journal of Micromechanics and Microengineering

Abstract:A new efficient and cost-effective method to fabricate a three-dimensional ordered nanodot array is developed. Using this method, firstly, a two-dimensional nanodot array is fabricated by a combination of nano-plastic forming patterning of an Au layer coated on the substrate and thermal dewetting-induced self-organization. Then, a multilayer ordered Au nanodot array is fabricated by repeating SiO2 deposition and Au deposition, followed by thermal dewetting. The extinction spectra of the fabricated ordered Au nanodot arrays show strong localized surface plasmon resonance. It is found that the extinction spectra of a single-layer nanodot array can be tuned by controlling fabrication conditions such as the thermal dewetting time. It is demonstrated that the optical properties of double-layer nanodot arrays can be tuned by controlling the spacer thickness and pitch setting. It is also found that the intensity of the extinction spectrum increases linearly with an increase in the number of layers in multilayer nanodot structures. This enhanced extinction gives rise to great potential for use in biosensing devices.