Abstract:The incident beam quality at the target determines the resolution and intensity of micro-focus X-ray sources, which depends greatly on the focusing system and the target. To meet different spatial layouts of the focusing system with transmission and reflection targets, three-dimension (3-D) modelling of the focusing system was built with Monte Carlo simulation and coordinate transforming method in this paper. In the proposed approach, the focusing system was first optimized by a 2-D model to achieve a fine beam spot with high effective current at the optimum working distance for the transmission and reflection targets. Then, 3-D practical model of the focusing system was achieved by tracing N electrons from the electron gun in three directions using the 5-order Runge-Kutta method. Finally, examples of the focusing system for 90 key and 30 key X-ray sources were given to get the energy distributions at transmission and reflection targets. Results show that resolutions of 4 mu m and 500 nm have been achieved for 90 key X-ray source with the transmission target and 30 key X-ray source with the reflection target respectively. Compared with the experimental results, 2-D modelling of the focusing system is also applicable for X-ray source with the transmission target while 3-D modelling of the focusing system is essential for X-ray source with the reflection target. In addition, the 3-D electron beam model will simplify the design of the real apertures, liner tubes, beam blankers etc.

Numerical design of polycapillary X-ray optics as both a focusing X-ray lens and a vacuum window

Grating-Based X-Ray Phase Contrast Imaging With a Polycapillary Semilens

Optimization of polycapillary lens for neutron focusing

Numerical design and characterization of a novel parallel beam combined lens based on X-ray capillary optics

Nested design and numerical simulation of ellipsoidal glass tube X-ray lens

Practical Design of the Focusing System for Transmission and Reflection Targets in X-ray Sources

Design and characterization of electron beam focusing for X-ray generation in novel medical imaging architecture

The Design and Test of Ellipsoidal Glass Capillaries As Condensers for X-ray Microscope

Design and Optimization of a Spectrometer for High-Resolution SD-OCT

Design of a monocapillary with an inner Al_2O_3/HfO_2 multilayer to obtain focused monochromatic hard X-rays

Application of a Monolithic Polycapillary X-ray Lens in EXAFS Experiments

Optimization of Focusing Structure for a Micro-Focus X-ray Source

A Focusing X-ray Spectrometer Based on Continuously Conical Crystal

Design of Hard X-Ray Focusing Telescope with A Large Field of View

Optical Focusing Mechanism for Short-arc Xenon Lamps

X‐ray optics for the cavity‐based X‐ray free‐electron laser

Development and Application of Glancing Incident X-Ray Fluorescence Spectrometry Using Parallel Polycapillary X-Ray Lens

Optimization-free Optical Focal Field Engineering Through Reversing the Radiation Pattern from a Uniform Line Source

High-efficiency focusing and imaging by dielectric kinoform zone plate lenses with soft X-rays.

Optical Design of a High-Resolution Spherical Grating Monochromator Beamline

Design of Electrostatic Lenses in Nanometer Scale Focusing Ion Beam System