Nonadiabatic Dynamics In Energetic Negative Fluorine Ions Scattering From A Si(100) Surface

lin chen,shunli qiu,feifei xiong,jianjie lu,pinyang liu,bin ding,yuan li,ying cui,yanling guo,ximeng chen
DOI: https://doi.org/10.1063/1.4930908
2015-01-01
Abstract:The dependence of the negative-ion fractions on incident energy and angle is reported for 8.5-22.5 keVF(-) ions scattered from a Si(100) surface at a fixed scattering angle of 38 degrees. The negative-ion fraction increases monotonically with incident velocity for specular scattering. In particular, the variation of the fraction with incident angle is bell shaped for a given incident energy. We interpret this variation using the incident-velocity effect at short distances where the yield of negative ions depends on the number of initial neutrals. It strongly indicates that at short distances, a dynamical equilibrium population is never achieved. This nonadiabatic feature is supported by simple calculations using modified rate equations. (C) 2015 AIP Publishing LLC.
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