Abstract:A new prototype non-contact profiler based on surface tracking has been specially developed. Surface tracking is carried out by a specially designed dual stage probe system with the aid of a four-Degree Of Freedom high-precision motion platform. The dual stage probe system keeps a short-range optical probe constantly tracking the surface by a self-developed voice coil motor servo, by which a wide measuring range of up to 10 mm is realized. The system performance evaluation including resolution, repeatability, and scanning speed proved the good capability of the new prototype non-contact profiler. To realize a full area covered 3D profile measurement of special-shaped optics within one scanning procedure, a signal intensity monitor integrated in the surface tracking controller is specially developed. In the experiment, a snip-single-corner-rectangular-shaped freeform surface was successfully measured over full area by the new non-contact profiler. This work provides an effective solution for 3D profile measurement of special-shaped optical surfaces over full reflecting area. Experimental results demonstrate that the proposed measuring system is of great significance in quality evaluation of optical surfaces.

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