Researches and Applications of Microelectronic Materials and Their Devices in the High-Frequency Ultrasonic Fields

Quanlu Li,Yuan Li,Jing Wu
DOI: https://doi.org/10.14355/aime.2015.03.002
2015-01-01
Advances in Microelectronic Engineering
Abstract:This paper essay offers survey of the research and development of the applications of microelectronics in the high-frequency ultrasonic fields. Furthermore, it briefly gives microelectronics materials and processing, their high-frequency ultrasonic transducer, and amplifications of the high-frequency ultrasonics, etc. Finally, some problems of microelectronics in the high-frequency ultrasonic fields, especially piezoelectric semiconductor and its acoustoelectric effect which need further researches are pointed out.
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