Fabrication of Field Emission Triodes Using Carbon Nanofibers

YF Liao,JC She,J Chen,SZ Deng,NS Xu

DOI: https://doi.org/10.1109/ivmc.2003.1223080

2003-01-01

Abstract:In this paper, we develop the technique for fabricating the field emitter arrays using carbon nanofibres as cathode material. Fabrication process by microwave plasma enhanced chemical vapor deposition (MPCVD).

What problem does this paper attempt to address?

Fabrication and Characterization of Gated Carbon Nanotube Emitters in A Trench Structure

YF Liao,JC She,H He,SZ Deng,J Chen,NS Xu

DOI: https://doi.org/10.1109/ivnc.2004.1354901

2004-01-01

Abstract:In the present paper, gated CNTs devices were fabricated via processes of (i) predefining a trench with thin SiO2 spacer layer and Cr extractor layer on top to form a fine gated device structure by using traditional ultraviolet light lithography and selective etching techniques; (ii) locally depositing iron (Fe) catalyst on the bottom of the gated structure employing a self-aligned method; (iii) locally growing CNT emitter inside the gated structure by a thermal chemical vapor deposition (CVD) system. Field emission characteristics of the gated CNTs devices were studied in a high vacuum chamber. The corresponding F-N plot of the I-V curve in were calculated and the result showed a linear behavior, demonstrating that the current was generated by field electron emission.
Fabrication of Carbon Nanotube Lateral Field Emitters

SB Lee,AS Teh,KBK Teo,M Chhowalla,DG Hasko,WI Milne,GAJ Amaratunga,H Ahmed

DOI: https://doi.org/10.1088/0957-4484/14/2/318

IF: 3.5

2003-01-01

Nanotechnology

Abstract:We report on the fabrication and field emission of carbon nanotube lateral field emitters. Due to its high aspect ratio and mechanical strength, we use vertically aligned multi-wall carbon nanotubes prepared by plasma-enhanced chemical vapour deposition as cathodes, which makes the fabrication of cantilever type lateral field emitters possible. The emission characteristics show that the field emission initiates at 11-17 V. The device has high geometrical enhancement factors (9.3 x 10(6) cm(-1)) compared to standard Spindt tips, which may be due to increased field concentration at the nanotube tip and the close proximity of the anode (< 1 mum). The relative ease of fabrication compared to vertical field emitters and enhanced field emission characteristics observed makes the carbon nanotube lateral field emitter a good candidate for future integrated nano-electronic devices.
Carbon Nanotubes As Field Emission Sources

WI Milne,KBK Teo,GAJ Amaratunga,P Legagneux,L Gangloff,JP Schnell,V Semet,VT Binh,O Groening

DOI: https://doi.org/10.1039/b314155c

2004-01-01

Journal of Materials Chemistry

Abstract:Micro and nano-structurally rich carbon materials are alternatives to conventional metal/silicon tips for field emission sources. In particular, carbon nanotubes exhibit extraordinary field emission properties because of their high electrical conductivity, their high aspect ratio "whisker-like'' shape for optimum geometrical field enhancement, and remarkable thermal stability. This paper will review the PECVD growth process, and the microfabrication techniques needed to produce well defined carbon nanotube based micro-electron sources for use in novel parallel e-beam lithography and high frequency microwave amplifier systems.
Lateral Field Emitters Fabricated Using Carbon Nanotubes

AS Teh,SB Lee,KBK Teo,M Chhowalla,WI Milne,DG Hasko,H Ahmed,GAJ Amaratunga

DOI: https://doi.org/10.1016/s0167-9317(03)00140-0

IF: 2.3

2003-01-01

Microelectronic Engineering

Abstract:We report on the fabrication of lateral emitters using carbon nanotubes (CNTs) grown via plasma enhanced chemical vapour deposition (PECVD). Carbon nanotubes are dispersed randomly onto a substrate, mapped, contacted with metal, and by etching the substrate, a suspended lateral emitter structure is formed. Field emission measurements from the lateral emitters show a turn-on voltage as low as 12 V. The emission characteristics showed good fits to the Fowler–Nordheim (FN) theory indicating that conventional field emission was indeed observed from these devices.
Electron emission from arrays of carbon nanotubes/fibres

W.I Milne,K.B.K Teo,M Chhowalla,G.A.J Amaratunga,D Pribat,P Legagneux,G Pirio,Vu Thien Binh,V Semet

DOI: https://doi.org/10.1016/S1567-1739(02)00166-9

IF: 2.856

2002-01-01

Current Applied Physics

Abstract:The overall aim of this work is to produce arrays of field emitting microguns, based on carbon nanotubes, which can be utilised in the manufacture of large area field emitting displays, parallel e-beam lithography systems and electron sources for high frequency amplifiers. This paper will describe the work carried out to produce patterned arrays of aligned multiwall carbon nanotubes (MWCNTs) using a dc plasma technique and a Ni catalyst. We will discuss how the density of the carbon nanotube/fibres can be varied by reducing the deposition yield through nickel interaction with a diffusion layer or by direct lithographic patterning of the Ni catalyst to precisely define the position of each nanotube/fibre. Details of the field emission behaviour of the different arrays of MWCNTS will also be presented.
Carbon Nanotubes/nanofibers for Microwave Amplifiers and Parallel E-Beam Lithography

P Vincent,L Gangloff,E Minoux,G Pirio,JP Schnell,D Pribat,P Legagneux,KBK Teo,R Lacerda,M Chhowalla,DG Hasko,H Ahmen,GAJ Amaratunga,V Semet,VT Binh,WH Bruenger,J Eichholz,H Hanssen,D Friedrich,M Castignolles,A Loiseau

DOI: https://doi.org/10.1109/ivmc.2003.1222989

2003-01-01

Abstract:In this paper, carbon nanotubes/nanofibers for microwave amplifiers and parallel e-beam lithography have been discussed. Field emission properties of CN arrays will be presented.
Synthesis and Characterization of Carbon Nanotube Grown on Flexible and Conducting Carbon Fiber Sheet for Field Emitter

Yûji Hayashi,Kenichi Suzuki,Byung Chul Jang,Tomoharu Tokunaga,Hidetoshi Matsumoto,Masaki Tanemura,Akihiko Tanioka,G.A.J. Amaratunga

DOI: https://doi.org/10.1016/j.diamond.2008.09.014

IF: 3.806

2009-01-01

Diamond and Related Materials

Abstract:We have successfully demonstrated the multiwall carbon nanotube (MWCNT) based field emission cathode fabricated on highly porous, flexible and conductive carbon fiber (CF) sheet without damage of CF sheet by chemical vapor deposition. CF sheet was composed of thin fibers with diameter of about 3 μm prepared by electrospray deposition. Well aligned MWCNTs grown on, or well anchored to, the flexible CF sheet was confirmed by transmission electron microscope. The field enhancement factor for MWCNT emitter fabricated on CF sheet was about 14,000 and 1.6 times higher than that of MWCNT emitter fabricated on Si substrate. Scanning electron microscopy image indicates that the electron emission occurred from the MWCNT field emitter arrays grown on carbon fibers not only at surface but also under layers in CF sheet. Field emission measurements revealed that this flexible MWCNT field emitter array has a great potential for the flexible field emission displays.
Efficient Carbon Nanotube Field Emitter Using Electrospun Carbon Nanofibers as a Flexible Electrode

Hidetoshi Matsumoto,Kenichi Suzuki,Kazuma Tsuboi,Mie Minagawa,Akihiko Tanioka,Yasuhiko Hayashi,Kazuyuki Fukuzono,Gehan A.J. Amaratunga

DOI: https://doi.org/10.1557/PROC-1173-U06-03

2009-01-01

Abstract:Thermal-stable, conductive, and flexible carbon fabric (CF), which is composed of thin carbon fibers prepared by electrospinning, was used for the substrate of carbon nanotube (CNT) field emitter arrays. The field emitter arrays were prepared by chemical vapor deposition (CVD). The current density-electric field characteristics revealed that the CNT field emitter arrays on CF produced a higher current density at a lower turn-on voltage compared to ones on a Si substrate. This emitter integrated with a gate electrode based on hierarchy-structured carbon materials, CNTs on CF, can be used for light sources, displays, and other electronic devices.
Plasma Enhanced Chemical Vapour Deposited Carbon Nanotubes for Field Emission Applications

Teo K. B. K.,Pirio G.,Lee S. B.,Chhowalla M.,Legagneux P.,Nedellec Y.,Hasko D. G.,Ahmed H.,Pribat D.,Amaratunga G. A. J.,Milne W. I.

DOI: https://doi.org/10.1557/proc-706-z5.9.1

2001-01-01

MRS Proceedings

Abstract:Plasma Enhanced Chemical Vapour Deposition is an extremely versatile technique for directly growing multiwalled carbon nanotubes onto various substrates. We will demonstrate the deposition of vertically aligned nanotube arrays, sparsely or densely populated nanotube forests, and precisely patterned arrays of nanotubes. The high-aspect ratio nanotubes (~50 nm in diameter and 5 microns long) produced are metallic in nature and direct contact electrical measurements reveal that each nanotube has a current carrying capacity of 10 7 -10 8 A/cm 2 , making them excellent candidates as field emission sources. We examined the field emission characteristics of dense nanotube forests as well as sparse nanotube forests and found that the sparse forests had significantly lower turn-on fields and higher emission currents. This is due to a reduction in the field enhancement of the nanotubes due to electric field shielding from adjacent nanotubes in the dense nanotube arrays. We thus fabricated a uniform array of single nanotubes to attempt to overcome these issues and will present the field emission characteristics of this.
Fabrication and electrical characteristics of carbon nanotube field emission microcathodes with an integrated gate electrode

g pirio,p legagneux,didier pribat,k b k teo,m chhowalla,g a j amaratunga,w i milne

DOI: https://doi.org/10.1088/0957-4484/13/1/301

IF: 3.5

2002-01-01

Nanotechnology

Abstract:We report on the fabrication of field emission microcathodes which use carbon nanotubes as the field emission source. The devices incorporated an integrated gate electrode in order to achieve truly low-voltage field emission. A single-mask, self-aligned technique was used to pattern the gate, insulator and catalyst for nanotube growth. Vertically-aligned carbon nanotubes were then grown inside the gated structure by plasma-enhanced chemical vapour deposition. Our self-aligned fabrication process ensured that the nanotubes were always centred with respect to the gate apertures (2 mum diameter) over the entire device. In order to obtain reproducible emission characteristics and to avoid degradation of the device, it was necessary to operate the gate in a pulsed voltage mode with a low duty cycle. The field emission device exhibited an initial turn-on voltage of 9 V. After the first measurements, the turn-on voltage shifted to 15 V, and a peak current density of 0.6 mA cm(-2) at 40 V was achieved, using a duty cycle of 0.5%.
Carbon Nanotubes On Carbon Fabrics For Flexible Field Emitter Arrays

katsutoshi suzuki,hisako matsumoto,mie minagawa,akihiko tanioka,yasuhiko hayashi,k fukuzono,gaj amaratunga

DOI: https://doi.org/10.1063/1.2967868

IF: 4

2008-01-01

Applied Physics Letters

Abstract:Flexible carbon fabrics (CFs) prepared by electrospray deposition were used for the substrate of carbon nanotube (CNT) field emitter arrays. CNTs were grown on the CFs by chemical vapor deposition. The CNT field emitter arrays on CFs produced a higher current density at a lower turn-on voltage compared to ones on a Si substrate.
Carbon Nanotubes And Their Potential Field Emission Applications

w i milne,k b k teo,n l rupesinghe,l gangloff,e minoux,j p schnell,d dieumegard,f peauger,p legagneux,d g hasko,g a j amaratunga,didier pribat

DOI: https://doi.org/10.1117/12.583352

2005-01-01

Abstract:Carbon nano-tubes are alternatives to conventional metal/silicon tips for field emission sources. They exhibit extraordinary field emission properties because of their high electrical conductivity, their high aspect ratio "whisker-like" shape for optimum geometrical field enhancement, and remarkable thermal stability. This paper will review the PECVD growth process, and the micro-fabrication techniques needed to produce well defined carbon nano-tube based micro-electron sources for use in a variety of applications.
Efficient Fabrication Of Field Electron Emitters From The Multiwalled Carbon Nanotube Yarns

yang wei,ding weng,yuanchao yang,xiaobo zhang,kaili jiang,liang liu,shoushan fan

DOI: https://doi.org/10.1063/1.2236465

IF: 4

2006-01-01

Applied Physics Letters

Abstract:An efficient method has been developed to fabricate field electron emitters by cutting a continuous multiwalled carbon nanotube (MWNT) yarn into segments. The cross section of each segment was composed of open-ended MWNTs which serve as field emitters. The emission current can reach several milliamperes, and the emitters can work stably for a long time. The excellent field emission properties are attributed to the large enhancement factor over 100 000, dense emitting centers, and the robust structure. The emitters might be easily manipulated and assembled into devices, such as electron guns, x-ray tubes, pixel tubes, etc. (c) 2006 American Institute of Physics.
Field emission from combined structures of carbon nanotubes and carbon nanofibers

Jian Liu,Gengmin Zhang,Jingfang Qin,Wei Zhang,Yingjie Xing,Dengzhu Guo,Ziyong Shen

DOI: https://doi.org/10.1016/j.physb.2010.03.029

2010-01-01

Abstract:A convenient and inexpensive approach to producing carbonaceous field emitters has been developed. Combined structures of carbon nanotubes (CNTs) and carbon nanofibers (CNFs) were grown on graphitic substrates with an improved chemical vapor deposition (CVD) method. The fabrication featured a high reaction temperature and a rapid temperature rising. In each combined structure, a CNT with good crystallinity was surrounded by a cone-shaped CNF. The CNTs and the bases of the CNFs were less than 0.1 and 10μm in diameter, respectively. These combined CNT/CNF structures, several ten microns in length, had an upward orientation from the substrate and an appropriate separation between each other, which are believed to be two favorable factors to the field emission. Electron current was readily extracted from them. Current densities of 10μA/cm2 and 1mA/cm2 were obtained when the average fields between the anode and the cathode were 2.3 and 3.9V/μm, respectively.
Fabrication of carbon nanotube field emission film by electrophoresis deposition and sintering

Yitian Peng,Yuanzhong Hu,Hui Wang

DOI: https://doi.org/10.1016/j.colsurfa.2008.07.021

2008-01-01

Abstract:Multi-wall carbon nanotube (MWCNT) films were prepared on the stainless steel plate using electrophoresis deposition and sintering techniques in this paper. The MWCNT film adsorbed strongly onto the substrate after the sintering process in the furnace. The MWCNT film exhibits excellent field emission properties with high emission current densities, low threshold electric fields and good field mission stability.
Field Emission from Dense, Sparse, and Patterned Arrays of Carbon Nanofibers

KBK Teo,M Chhowalla,GAJ Amaratunga,WI Milne,G Pirio,P Legagneux,F Wyczisk,D Pribat,DG Hasko

DOI: https://doi.org/10.1063/1.1461868

IF: 4

2002-01-01

Applied Physics Letters

Abstract:We compare the field emission characteristics of dense (109 nanofibers/cm2), sparse (107 nanofibers/cm2), and patterned arrays (106 nanofibers/cm2) of vertically aligned carbon nanofibers on silicon substrates. The carbon nanofibers were prepared using plasma-enhanced chemical vapor deposition of acetylene and ammonia gases in the presence of a nickel catalyst. We demonstrate how the density of carbon nanofibers can be varied by reducing the deposition yield through nickel interaction with a diffusion layer or by direct lithographic patterning of the nickel catalyst to precisely position each nanofiber. The patterned array of individual vertically aligned nanofibers had the most desirable field emission characteristics, highest apparent field enhancement factor, and emission site density.
Hot electron field emission via individually transistor-ballasted carbon nanotube arrays.

Chi Li,Yan Zhang,Matthew T Cole,Sai G Shivareddy,Jon S Barnard,Wei Lei,Baoping Wang,Didier Pribat,Gehan A J Amaratunga,William I Milne

DOI: https://doi.org/10.1021/nn300111t

IF: 17.1

2012-01-01

ACS Nano

Abstract:We present electronically controlled field emission characteristics of arrays of individually ballasted carbon nanotubes synthesized by plasma-enhanced chemical vapor deposition on silicon-on-insulator substrates. By adjusting the source-drain potential we have demonstrated the ability to controllable limit the emission current density by more than 1 order of magnitude. Dynamic control over both the turn-on electric field and field enhancement factor have been noted. A hot electron model is presented. The ballasted nanotubes are populated with hot electrons due to the highly crystalline Si channel and the high local electric field at the nanotube base. This positively shifts the Fermi level and results in a broad energy distribution about this mean, compared to the narrow spread, lower energy thermalized electron population in standard metallic emitters. The proposed vertically aligned carbon nanotube field-emitting electron source offers a viable platform for X-ray emitters and displays applications that require accurate and highly stable control over the emission characteristics.
Fabrication Of Field Emission Cathode By Spraying Multiwalled Carbon Nanotubes On Screen Printed Substrate

P. Liu,Y. Wei,L. M. Sheng,L. Liu,S. S. Fan

DOI: https://doi.org/10.4028/3-908451-30-2.247

2007-01-01

Solid State Phenomena

Abstract:Carbon nanotube containing solution is sprayed onto the glass substrate which is screen printed with conductive paste to fabricate a field emission cathode. After the spraying, a scratch surface treatment is adopted for better emission, and the assembly sintered in a vacuum furnace at about 400 degrees C-500 degrees C. The emission I-V curve and the current stability are measured in a vacuum chamber with 5 x 10(-5) Pa base pressure. With a phosphor anode, the cathode can display static images in a diode structure, and a sealed display prototype is demonstrated. The spraying technique has an advantage of more simple and uniform carbon nanotube distribution over the conventional carbon nanotube paste printing.
Carbon Nanotube Lateral Field Emission Device with Embedded Field Effect Transistor

Y. Yang,S. Huo,L. H. Jiang,Y. C. Kong,T. S. Chen,H. Zhou,A. S. Teh,T. Butler,D. Hasko,G. A. Amaratunga

DOI: https://doi.org/10.1109/edssc.2018.8487091

2018-01-01

Abstract:A novel device structure that combines field emission and field effect transistor (FET) on a laterally grown individual semiconducting singlewalled carbon nanotube (SWNT) is proposed and realized. The SWNT serves as both the channel of the FET and the field emitter. The emission current is restricted to the supply current from the FET and hence subject to the gate modulation. The bias conditions on either device are self-adaptive to satisfy current continuity. The measurement results demonstrate good emission current stability and effective gate control over the emission characteristics. This novel type of device could establish a new approach to develop miniaturized field emission devices with superior characteristics for chip-level integration.
Fabrication of Carbon Nanotubes on Interdigitated Metal Electrode for Switchable Nanophotonic Devices

Q. Dai,H. Butt,R. Rajasekharan,T. D. Wilkinson,G. A. J. Amaratunga

DOI: https://doi.org/10.2528/pier12022603

2012-01-01

Abstract:This paper reports the modeling and characterization of interdigitated rows of carbon nanotube electrodes used to address a liquid crystal media. Finite Element Method modeling of the nanotube arrays was performed to analyze the static electric fields produced to find suitable electrode geometry. A device was fabricated based on the simulation results and electro optics characteristics of the device are presented. This finding has applications in the development of micron and submicron pixels, precise beem steering and nanotube based active back planes.

Fabrication of Field Emission Triodes Using Carbon Nanofibers

Fabrication and Characterization of Gated Carbon Nanotube Emitters in A Trench Structure

Fabrication of Carbon Nanotube Lateral Field Emitters

Carbon Nanotubes As Field Emission Sources

Lateral Field Emitters Fabricated Using Carbon Nanotubes

Electron emission from arrays of carbon nanotubes/fibres

Carbon Nanotubes/nanofibers for Microwave Amplifiers and Parallel E-Beam Lithography

Synthesis and Characterization of Carbon Nanotube Grown on Flexible and Conducting Carbon Fiber Sheet for Field Emitter

Efficient Carbon Nanotube Field Emitter Using Electrospun Carbon Nanofibers as a Flexible Electrode

Plasma Enhanced Chemical Vapour Deposited Carbon Nanotubes for Field Emission Applications

Fabrication and electrical characteristics of carbon nanotube field emission microcathodes with an integrated gate electrode

Carbon Nanotubes On Carbon Fabrics For Flexible Field Emitter Arrays

Carbon Nanotubes And Their Potential Field Emission Applications

Efficient Fabrication Of Field Electron Emitters From The Multiwalled Carbon Nanotube Yarns

Field emission from combined structures of carbon nanotubes and carbon nanofibers

Fabrication of carbon nanotube field emission film by electrophoresis deposition and sintering

Field Emission from Dense, Sparse, and Patterned Arrays of Carbon Nanofibers

Hot electron field emission via individually transistor-ballasted carbon nanotube arrays.

Fabrication Of Field Emission Cathode By Spraying Multiwalled Carbon Nanotubes On Screen Printed Substrate

Carbon Nanotube Lateral Field Emission Device with Embedded Field Effect Transistor

Fabrication of Carbon Nanotubes on Interdigitated Metal Electrode for Switchable Nanophotonic Devices