Reflective 16-Phase-level Kinoform for Beam Array Generator

P LONG,DS HSU,MX WU,KF CHIN,SP GAO
DOI: https://doi.org/10.1117/12.138878
1993-01-01
Abstract:This paper reports design and fabrication of reflective phase relief kinoform with 16 phase levels. This kinoform converts a single beam to a 5 X 5 beam array. The measured diffraction efficiency is 76.16%, near the designed one of 79.68%. The aperture of the kinoform is 10 mm X 10 mm.
What problem does this paper attempt to address?