Preparation of the Ti(C,N) Film by Ion Plating and Its Oxidation Resistance

沈星,万建国
DOI: https://doi.org/10.3969/j.issn.0254-6051.2003.12.005
2003-01-01
Abstract:The multi-component Ti(C,N) film was deposited on austenite stainless steel 1Cr18Ni9Ti.By measuring the film's basic properties,the optimum flow ratio of reactive gases (C_2H_2 and N_2) was confirmed to be 0.1,with the flow C_2H_2 and N_2 is 5mL/min and 50mL/min respectively.The oxidation resistance of the film at the temperature range of 750℃~950℃ was studied by SEM and XRD analysis,the results show that the Ti(C,N) film has excellent oxidation resistance and can efficiently protect the substrate,especially at high temperature.
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