A Cmos-Compatible Hybrid Plasmonic Slot Waveguide with Enhanced Field Confinement
Jing Xiao,Qi-Qin Wei,Dao-Guo Yang,Ping Zhang,Ning He,Guo-Qi Zhang,Tian-Ling Ren,Xian-Ping Chen
DOI: https://doi.org/10.1109/led.2016.2531990
IF: 4.8157
2016-01-01
IEEE Electron Device Letters
Abstract:The emerging field of nanophotonics requires plasmonic devices to be fully compatible with semiconductor fabrication techniques. However, very few feasible practical structures exist at present. Here, we propose a CMOS-compatible hybrid plasmonic slot waveguide (HPSW) with enhanced field confinement. Our simulation results show that the HPSW exhibits significantly enhanced field confinement as compared with the traditional low-index slot waveguides and the hybrid metal dielectric slot waveguides. By controlling the thicknesses of different layers, an optimized HPSW structure with a better tradeoff between field confinement and propagation length has been simultaneously achieved.