Detection of optical field by near-field scanning optical microscopy

tiejun xu,jiying xu,jia wang,dong pan,liqun sun,qian tian
DOI: https://doi.org/10.1117/12.483336
2002-01-01
Abstract:Based on theory and method of the near-field optics, optical resolution of near-field scanning optical microscopy (NSOM) is beyond the classical optical diffraction limit and down to tens of nanometer or even less. In this paper, a collection mode NSOM is built to detect and analyze local near-field distribution. The output optical field of a standard 1mum X 1mum scale 2D grating has been detected. This NSOM system can also be used to study local near-field distribution of the focused spot of solid immerging lens (SIL) and the result can be directly used to evaluate SIL and compared with the calculation of its theoretical model and as a result, to improve the theoretical model.
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