Controllable Synthesis of Silicon Nano-Particles Using a One-Step PECVD-ionic Liquid Strategy

Wei Qin,Shimin Cheng,Bin Zhou,Yihui Wu,Shengzhong (Frank) Liu,Can Li

DOI: https://doi.org/10.1039/c5ta01774b

IF: 11.9

2015-01-01

Journal of Materials Chemistry A

Abstract:Silicon nano-particles (SiNPs) with various sizes can be controllably synthesized by a facile and novel PECVD-IL method.

What problem does this paper attempt to address?

One-pot synthesis of colloidal silicon quantum dots and surface functionalization via thiol-ene click chemistry.

Xiaoyu Cheng,Richard Gondosiswanto,Simone Ciampi,Peter J Reece,J Justin Gooding

DOI: https://doi.org/10.1039/c2cc35954e

IF: 4.9

2012-01-01

Chemical Communications

Abstract:A solution method for preparing surface functionalized colloidal silicon quantum dots (SiQDs) is presented. SiQDs prepared by this method are reasonably monodispersed and can be further functionalized via thiol-ene click reactions to introduce specific functionalities (i.e. -NH2, -COOH, -SO3-, alkane, alkene).
Phase-controlled Synthesis of Nickel Silicide Nanostructures

Xing Fan,Hui Zhang,Ning Du,Deren Yang

DOI: https://doi.org/10.1016/j.materresbull.2012.06.017

IF: 5.6

2012-01-01

Materials Research Bulletin

Abstract:Dense single-crystalline Ni2Si nanowires, Ni3Si2 nanowires and nanorods, and NiSi nanowires have been successfully synthesized in large-scale on the surface of Ni foam via a simple chemical vapor deposition of SiH4 at 450–600°C. It is indicated that the reaction temperature and the flow rate of SiH4 play an important role in the control of phases and morphologies of nickel silicide nanostructures. The temperature controls the balance of Ni-diffusion and the degree of supersaturation of Si in Ni, thus producing different nickel silicide phases, whereas the different flow rates of SiH4 lead to the different nickel silicide morphologies by controlling the size and the quality of the nucleation centers. We expect that our synthesis approach and results will provide valuable information for the fabrication and application of other metal silicide nanostructures.
Tiny silicon nano-wires synthesis on silicon wafers

Junjie Niu,Jian Sha,Yujie Ji,Deren Yang

DOI: https://doi.org/10.1016/j.physe.2004.06.041

2004-01-01

Physica E: Low-Dimensional Systems and Nanostructures

Abstract:Tiny silicon nano-wires (SiNWs) were synthesized on silicon wafers by the chemical vapor deposition (CVD) technique. The morphology and structure of tiny SiNWs were analyzed by means of transmission electron microscopy (TEM), scanning electron microscopy (SEM) and X-ray diffraction (XRD), respectively. The results indicate that the tiny SiNWs were part-crystalline structure and were about 3 nm in minimal diameter. Based on the line shift of Raman spectra, the structure transform of the tiny SiNWs was discussed. The defect-inducing growth mechanism will probably provide a new method for the minimum of the one-dimensional nano-materials.
Direct writing of silicon nanostructures using liquid-phase electron beam induced deposition of hydrosilanes

Takashi Masuda,Masahiro Mori

DOI: https://doi.org/10.1088/1361-6528/abe0e9

IF: 3.5

2021-05-07

Nanotechnology

Abstract:Solid Si (wafer) and gaseous Si (silane) are generally used as starting materials for fabricating Si devices. In this study, a liquid precursor (liquid-phase hydrosilane) for semiconducting Si, called liquid Si (liq-Si), was synthesized to establish a liquid pathway for fabricating Si. Although the liquid-to-solid Si conversion can be induced by heating at 400 °C, conversion without heating was realized herein by electron-beam (EB) irradiation. This study is the first to irradiate liq-Si with EB. Size-controllable Si nanodots, with diameters of the order of 100 nm, were directly deposited at any point by liquid-phase electron-beam-induced deposition (LP-EBID) with a beam diameter of 50 nm. This approach yielded less-contaminated deposits at the detection limit of energy-dispersive x-ray spectroscopy, as opposed to typical EBID, wherein carbon impurities up to 90% are found. The processing resolution of LP-EBID is potentially 1 nm or less. Therefore, this non-heating deposition technique realizes the direct writing of Si nanostructures and would be a powerful tool for Si nanofabrication.
400-900 Nm Light Emitting Silicon Nanoparticles

Stephen A. Campbell,Uwe R. Kortshagen,Richard Liptak,Xiaodong Pi

2007-01-01

Abstract:A novel process has been developed to create silicon nanoparticles (Si-NPs) that emit controlled colors from blue to the near infrared. The emission is reasonably stable in air. This is the first ever report of a process that can produce the full spectrum of visible light from silicon and the first process that creates air-stable blues, greens, and yellows. The particles are created in a nonthermal silane plasma and the resultant aerosol is sent to a second plasma. The process in this chamber involves simultaneously etching and passivating the nanoparticles using a CF4 plasma. The plasma leaves a coating on the surface that prevents the formation of Si=O bonds that are typically seen after air exposure.
Controlled synthesis of semiconductor nanostructures in the liquid phase.

Zhongbin Zhuang,Qing Peng,Yadong Li

DOI: https://doi.org/10.1039/c1cs15095b

IF: 46.2

2011-01-01

Chemical Society Reviews

Abstract:The microstructure (composition, size and shape etc.) of semiconductor nanocrystals determine the electronic density of states of semiconductor nanomaterials and ultimately determine their optical and electrical properties. Semiconductor nanocrystal advanced structures, such as hybrid nanostructures and nanocrystal superlattices, not only integrate the function of individual nanocrystals, but also brings the materials collective and synchronic properties. How to control the monodispersity, composition and structure of as-prepared semiconductor nanocrystals during their syntheses, as well as their furthermore assembly, has been a hot research area in this decade. This critical review focuses on the development of synthetic and assembly methods (techniques) of semiconductor nanocrystals processed in the liquid phase. Emphasis is on the synthesis methodology, microstructure related properties of semiconductor nanocrystals, and their applications (243 references).
Fabrication of ultra-small SiC nanoparticles with adjustable size, stoichiometry and photoluminescence by AC multi-arc plasmas

Cheng Wang,Jiawen Zhou,Ming Song,Xianhui Chen,Yan Zheng,Chengpeng Yang,Weiluo Xia,Weidong Xia

DOI: https://doi.org/10.1016/j.ceramint.2021.09.142

IF: 5.532

2022-01-01

Ceramics International

Abstract:Ultra-small SiC nanoparticles with sizes smaller than 10 nm have wide prospects in optoelectronics and biomedical engineering, but challenges in their synthetic methods still limit their practical applications. In this paper, an AC multi-arc plasma device was designed for the continuous gas-phase synthesis of ultra-small SiC nanoparticles. SiC nanoparticles with an average size range of 7–10 nm, abundant surface functional groups, and obvious photoluminescence emission were fabricated by the decomposition of triethylsilane in AC multi-arc plasmas. The synthesized SiC nanoparticles had a typical core-shell structure, whose core was mainly β-SiC and whose shell was covered by a few carbon layers. It was also found that the buffer gas effectively adjusted the particle size, crystal texture, stoichiometric ratio of each element, functional group composition, and photoluminescence. These adjustments were meaningful for the controllable preparation and practical utilization of ultra-small SiC nanoparticles. According to the product characteristics, the formation path of SiC nanoparticles and the influence of buffer gases were proposed.

materials science, ceramics
Nanomaterials Via Solution Combustion Synthesis: a Step Nearer to Controllability

Wei Wen,Jin-Ming Wu

DOI: https://doi.org/10.1039/c4ra10145f

2015-01-01

ChemInform

Abstract:Solution combustion synthesis (SCS) is a worldwide adopted technique to synthesize nanomaterials, especially for oxides, because of its simplicity, energy and time-effectiveness, and low cost. The general difficulty encountered in SCS is the controllability over phases and morphologies of the products, which arises from the inherent rapid and uncontrollable combustion procedure. In this regard, the present work is devoted to review the recent progress on phase- and morphology-controlled SCS in detail. Besides the various metal oxides, SCS is now applicable to fabricate nanomaterials of metal phosphates, metal silicates, metal borates, metal sulfides, metals, and even alloys, through careful selection of solution compositions. Oxides with regular morphologies of flowers, belts, triangles, tubes, wires, and rods can be synthesized by SCS, in the presence of certain templates, or through a self-assembly procedure. The recent progress made on the synthesis of porous materials via SCS is summarized. SCS is also capable of growing metal oxide thin films at low temperatures, enabling the fabrication of low-cost and high-performance electronics on flexible plastic substrates.
A Controlling Method For Agi Nanoparticles Preparation Using Combinatorial Surfactants

Dandan Liu,Xianting Ding,Jian Yang,Zhijun Ma,Weiping Wang

DOI: https://doi.org/10.1109/NANO.2013.6720996

2013-01-01

Abstract:AgI nanoparticle has been reported to exhibit size-dependent properties. In the paper, we reported the use of combinations of surfactants, such as AOT, SDS, PVP and TWEEN20, to control the AgI synthesis. AgI nanoparticles can be obtained with different sizes. Measured and confirmed by DLS and TEM, the nanoparticles can be massively and evenly prepared with the sizes less than 20nm. The post-processing of extraction for the nanoparticles is relatively simple and environmentally friendly. Further experimental results demonstrate that the stability of the nanoparticles is greatly dependent on the formula of the surfactant compositions. The method presented here is a potential high-throughput technique that could be applied to synthesize many other nanoparticles.
Facile Morphology Control During Rapid Fabrication of Nanosized Organosilica Particles

Zhinan Fu,Li,Fen Li,Rizwan Ahmed,Xiaofeng Niu,Dianhua Liu,Xuhong Guo

DOI: https://doi.org/10.1021/acs.iecr.0c02668

2020-01-01

Industrial & Engineering Chemistry Research

Abstract:Nanosized organosilica particles with tunable morphology are of great interest for versatile applications because of their enhanced properties. However, it is still a great challenge to control the morphology during fabrication of organosilica nanoparticles (NPs). In this study, a facile approach based on flash nano-precipitation (FNP) technique is presented, which achieves an efficient fabrication of organosilica NPs with controllable morphology by utilizing an amphiphilic block copolymer poly(2-(dimethylamino) ethylmethylacrylate-b-poly(epsilon-caprolactone) (PDMAEMA-b-PCL) as the stabilizer. Such a preparation process is performed in a multi-inlet vortex mixer that enables an intense mixing of the silicon precursor with the aqueous solution of a catalyst at an ultrashort time scale, leading to the formation of numerous tiny reaction droplets stabilized by PDMAEMA-b-PCL, followed by the basic-catalyzed hydrolytic condensation. Interestingly, by controlling the composition and mixing parameter of feeding streams involved in the FNP process, golf ball-like, cubic, bowl-like, and hollow organosilica NPs can be easily obtained. The resultant NPs show a narrow size distribution and are expected to find potential applications in various fields, such as nanomedicine, nanocatalysts, and adsorption separation.
Precise morphology control of in-plane silicon nanowires via a simple plasma pre-treatment

Zhaoguo Xue,Wanghua Chen,Xianhong Meng,Jun Xu,Yi Shi,Kunji Chen,Linwei Yu,Pere Roca Cabarrocas

DOI: https://doi.org/10.1016/j.apsusc.2022.153435

IF: 6.7

2022-01-01

Applied Surface Science

Abstract:Silicon nanowires (SiNWs) are advantageous building blocks to explore a wide range of high performance nanoelectmnics and photonics devices. In-plane solid-liquid-solid (IPSLS) SiNWs, grown by metal catalyst droplets that absorb hydrogenated amorphous silicon (a-Si:H) thin film to produce crystalline SiNWs, are particularly suitable for planar device fabrication and integration. Here, we explore a new growth control dimension to tailor the geometry of the in-plane SiNWs from island-chain to zigzag and to straight morphologies by using a simple plasma modification of the a-Si:H thin film precursor. This unique capability is due to fact that the Gibbs energy and bonding status of the a-Si:H layer can be largely modified by the plasma treatments at various substrate temperatures, which in turn have a huge impact on the growth balance condition of the SiNWs and consequently on their morphologies. These results highlight a facile and yet highly effective strategy to tailor the morphologyof in-plane SiNWs that will find important applications in fabricating nanoelectronic, sensor and logic devices.
Plasma synthesis of single crystal silicon nanoparticles for novel electronic device applications

Ameya Bapat,Curtis Anderson,Christopher R. Perrey,C. Barry Carter,Stephen A. Campbell,Uwe Kortshagen

DOI: https://doi.org/10.1088/0741-3335/46/12B/009

2004-10-07

Abstract:Single-crystal nanoparticles of silicon, several tens of nm in diameter, may be suitable as building blocks for single-nanoparticle electronic devices. Previous studies of nanoparticles produced in low-pressure plasmas have demonstrated the synthesis nanocrystals of 2-10 nm diameter but larger particles were amorphous or polycrystalline. This work reports the use of a constricted, filamentary capacitively coupled low-pressure plasma to produce single-crystal silicon nanoparticles with diameters between 20-80 nm. Particles are highly oriented with predominant cubic shape. The particle size distribution is rather monodisperse. Electron microscopy studies confirm that the nanoparticles are highly oriented diamond-cubic silicon.

Plasma Physics,Atomic and Molecular Clusters
In Situ Synthesis of Large-Area Single Sub-10 Nm Nanoparticle Arrays by Polymer Pen Lithography

Jin Wu,Xiaoli Zan,Shaozhou Li,Yayuan Liu,Chenlong Cui,Binghua Zou,Weina Zhang,Hongbo Xu,Hongwei Duan,Danbi Tian,Wei Huang,Fengwei Huo

DOI: https://doi.org/10.1039/c3nr05033e

IF: 6.7

2014-01-01

Nanoscale

Abstract:In order to take advantage of the unique properties of nanoparticles in integrated devices, it is desirable to position monodispersed nanoparticles on substrates with controlled placement. Herein, we utilize small molecules such as ethylene glycol (EG) or glycerol to facilitate the delivery of nanoparticle precursors to the substrates in the polymer pen lithography (PPL) process. Subsequently, large-area ordered single nanoparticle arrays, including sub-10 nm Ag nanoparticle, 30 nm Au nanoparticle and 80 nm Fe2O3 nanoparticle arrays have been synthesized in situ with controllable sizes and pitches.
Controllable synthesis of one-dimensional silicon nanostructures based on the dual effects of electro-deoxidation and the Kirkendall effect

Jianxin Tu,Shuo Yu,Kui Hao,Le Sun,Ruicheng Bai,Fangzhou Zhang,Aijun Li,Hong Liu

DOI: https://doi.org/10.1007/s12274-024-6842-8

IF: 9.9

2024-07-14

Nano Research

Abstract:In this study, we successfully synthesized silicon nanotubes (Si-NTs) and silicon nanowires (Si-NWs) in a controllable manner using a catalyst- and template-free method through the direct electrolysis of SiO 2 in a molten CaCl 2 -CaO system, while also proposing a novel formation mechanism for Si-NTs. Si-NWs are formed through electro-deoxidation when the cell voltage is within the range of CaO decomposition voltage and SiO 2 decomposition voltage. By subsequently adjusting the voltage to a value between the decomposition potentials of CaCl 2 and CaO, in-situ electro-deoxidation of CaO takes place on the surface of the synthesized Si-NWs, leading to the formation of a Ca layer. The formation of Ca-Si diffusion couple leads to the creation of vacancies within the Si-NWs, as the outward diffusion rate of Si exceeds the inward diffusion rate of Ca. These differential diffusion rates between Si and Ca in a diffusion couple exhibit an analogy to the Kirkendall effect. These vacancies gradually accumulate and merge, forming large voids, which ultimately result in the formation of hollow SiCa-NTs. Through a subsequent dealloying process, the removal of the embedded calcium leads to the formation of Si-NTs. Following the application of a carbon coating, the Si-NTs@C composite showcases a high initial discharge capacity of 3211 mAh·g −1 at 1.5 A·g −1 and exhibits exceptional long-term cycling stability, maintaining a capacity of 977 mAh·g −1 after 2000 cycles at 3.0 A·g −1 .

materials science, multidisciplinary,nanoscience & nanotechnology,physics, applied,chemistry, physical
Self-Controlled Synthesis of Microscale Silicide Embossments and Pits with Multi-Shape and Orientation

Song Liu,Peikai Zhang,Dandan Wang,Yimin Cui

DOI: https://doi.org/10.1166/nnl.2015.2051

2015-01-01

Nanoscience and Nanotechnology Letters

Abstract:By high temperature annealing of silicon wafers with thin Cu and Fe films deposited on, we got the silicides embossments (SEs)/silicon etching pits (SEPs) with different morphologies. Microscale triangle, square and wire-like SEs/SEPs were obtained on Si(111), Si(100) and Si(110) substrates, respectively. The synthesis of SEs/SEPs was closely related to temperature and orientation of Si substrates. We got copper silicides embossments at 950 degrees C but silicon etching pits at 1100 degrees C. The size of SEs/SEPs can be changed from hundred nm to several mu m. We analyzed the morphological evolution and formation mechanism from SEs to SEPs with comparing samples of different temperature. This simple and practicable work may help to develop new technology for Si-based nanofabrication and to find potential functional nanomaterials in the future.
Fabrication of Size-Controllable Nanofluidic Channels Using Angled Physical Vapor Deposition

Xiaojun Li,Xudi Wang,Xin Li,Jian Jin,Hui You,Keqiang Qiu,Shaojun Fu

DOI: https://doi.org/10.1016/j.mee.2012.07.029

IF: 2.3

2012-01-01

Microelectronic Engineering

Abstract:In this paper, we demonstrate a new and simple method to achieve ultrasmall nanochannels downing size to about 50nm with well-controlled dimensions in large area by using NIL and angled physical vapor deposition (PVD). The polymer SU-8 nanogratings substrate is fabricated using NIL. After NIL, oblique angle ion beam sputtering of silicon oxide was used, in a single step, to reduce the cross section of the SU-8 imprinted trenches and seal the channels at the same time. During this process, the sidewalls of any trench will shadow the evaporation and most of the silicon oxide film will be deposited on the sidewalls at the top of the trench, therefore, the shadow area will be protected and ultimately formed as sealed nanochannels on substrate. The advantage of this process is that the line width can be adjustable simply by controlling the deposition as well as the imprint depth, offering an alternative solution for high-resolution and low-cost fabrication of nanofluidic chip. The method is applicable for most substrates and cover layer, therefore, it provides a new way to produce size reduction and size controlling of nanopatterns for various material.
Synthesis of Carbon Nanotube Composites with Size-Controlled Silicon Nanoparticles

Xingfu Zhu,Baiying Xia,Mingyi Guo,Qian Zhang,Jixue Li

DOI: https://doi.org/10.1016/j.carbon.2010.04.048

IF: 10.9

2010-01-01

Carbon

Abstract:A new route for the synthesis of silicon nanoparticle (Si NP)/carbon nanotube (CNT) composites by a low-temperature magnesiothermic reduction process is presented. The size of the Si NPs can be controlled by varying the silica (SiO2) thickness of SiO2/CNT precursors. The structural and morphological characterizations of the Si NP/CNT composites have been carried out using powder X-ray diffraction and transmission electron microscopy.
A PTFE helical capillary microreactor for the high throughput synthesis of monodisperse silica particles

Hui Yang,Eser Metin Akinoglu,Lijing Guo,Mingliang Jin,Guofu Zhou,Michael Giersig,Lingling Shui,Paul Mulvaney

DOI: https://doi.org/10.1016/j.cej.2020.126063

IF: 15.1

2020-12-01

Chemical Engineering Journal

Abstract:<p>We propose a simple and inexpensive SiO<sub>2</sub> submicron particle synthesis method based on a PTFE helical capillary microreactor. The device is based on Dean flow mediated, ultrafast mixing of two liquid phases in a microfluidic spiral pipe. Excellent control of particle size between 100 nm and 600 nm and narrow polydispersity can be achieved by controlling the device and process parameters. Numerical simulations are performed to determine the optimal device dimensions. In the mother liquor the silica particles exhibit zeta potentials < −60 mV, rendering them very stable even at high particle volume fractions. The current device typically produces around 0.234 g/h of the silica particles.</p>

engineering, chemical, environmental
Controlled fabrication of Si nanocrystals embedded in thin SiON layers by PPECVD followed by oxidizing annealing

S Perret-Tran-Van,K Makasheva,B Despax,C Bonafos,P E Coulon,V Paillard

DOI: https://doi.org/10.1088/0957-4484/21/28/285605

IF: 3.5

2010-07-16

Nanotechnology

Abstract:The controlled fabrication of Si nanocrystals embedded in thin silicon oxynitride films (<15 nm) on top of a silicon substrate has been realized by PPECVD with N(2)O-SiH(4) precursors. The effect of inert and oxidizing annealing processes on the Si nanocrystal spatial and size distributions is studied by coupling ellipsometry measurements and cross-sectional transmission electron microscopy observations. This study gives an interesting insight into the physics underlying the Si nanocrystal nucleation, growth and oxidation mechanisms. In particular, it evidences the presence in the as-deposited films of a high density of small amorphous Si particles that crystallize after high temperature thermal annealing. Annealing under oxidizing conditions is shown to be a powerful way to create tunnel oxides of good quality and controlled thickness needed to design future memory devices.
Size-tunable silicon nanoparticles synthesized in solution via a redox reaction

Megan A Parker,Maria Letizia De Marco,Alexander Castro-Grijalba,Anissa Ghoridi,David Portehault,Stanislav Pechev,Elizabeth A Hillard,Sabrina Lacomme,Aurélie Bessière,Frédérique Cunin,Patrick Rosa,Mathieu Gonidec,Glenna L Drisko,Megan A. Parker,Elizabeth A. Hillard,Glenna L. Drisko

DOI: https://doi.org/10.1039/d3nr05793c

IF: 6.7

2024-04-04

Nanoscale

Abstract:A current challenge in silicon chemistry is to perform liquid-phase synthesis of silicon nanoparticles, which would permit the use of colloidal synthesis techniques to control size and shape. Herein we show how silicon nanoparticles were synthesized at ambient temperature and pressure in organic solvents through a redox reaction. Specifically, a hexacoordinated silicon complex, bis( N , N ′-diisopropylbutylamidinato)dichlorosilane, was reduced by a silicon Zintl phase, sodium silicide (Na 4 Si 4 ). The resulting silicon nanoparticles were crystalline with sizes tuned from a median particle diameter of 15 nm to 45 nm depending on the solvent. Photoluminescence measurements performed on colloidal suspensions of the 45 nm diameter silicon nanoparticles indicated a blue emission signal, attributed to the partial oxidation of the Si nanocrystals or to the presence of nitrogen impurities.

materials science, multidisciplinary,physics, applied,nanoscience & nanotechnology,chemistry

Controllable Synthesis of Silicon Nano-Particles Using a One-Step PECVD-ionic Liquid Strategy

One-pot synthesis of colloidal silicon quantum dots and surface functionalization via thiol-ene click chemistry.

Phase-controlled Synthesis of Nickel Silicide Nanostructures

Tiny silicon nano-wires synthesis on silicon wafers

Direct writing of silicon nanostructures using liquid-phase electron beam induced deposition of hydrosilanes

400-900 Nm Light Emitting Silicon Nanoparticles

Controlled synthesis of semiconductor nanostructures in the liquid phase.

Fabrication of ultra-small SiC nanoparticles with adjustable size, stoichiometry and photoluminescence by AC multi-arc plasmas

Nanomaterials Via Solution Combustion Synthesis: a Step Nearer to Controllability

A Controlling Method For Agi Nanoparticles Preparation Using Combinatorial Surfactants

Facile Morphology Control During Rapid Fabrication of Nanosized Organosilica Particles

Precise morphology control of in-plane silicon nanowires via a simple plasma pre-treatment

Plasma synthesis of single crystal silicon nanoparticles for novel electronic device applications

In Situ Synthesis of Large-Area Single Sub-10 Nm Nanoparticle Arrays by Polymer Pen Lithography

Controllable synthesis of one-dimensional silicon nanostructures based on the dual effects of electro-deoxidation and the Kirkendall effect

Self-Controlled Synthesis of Microscale Silicide Embossments and Pits with Multi-Shape and Orientation

Fabrication of Size-Controllable Nanofluidic Channels Using Angled Physical Vapor Deposition

Synthesis of Carbon Nanotube Composites with Size-Controlled Silicon Nanoparticles

A PTFE helical capillary microreactor for the high throughput synthesis of monodisperse silica particles

Controlled fabrication of Si nanocrystals embedded in thin SiON layers by PPECVD followed by oxidizing annealing

Size-tunable silicon nanoparticles synthesized in solution via a redox reaction