Extended-wavelength 640 × 1 Linear InGaAs Detector Arrays Using N-on-P Configuration for Back Illumination

Zhu Yao-Ming,Li Yong-Fu,Li Xue,Tang Heng-Jing,Shao Xiu-Mei,Chen Yu,Deng Hong-Hai,Wei Peng,Zhang Yong-Gang,Gong Hai-Mei
DOI: https://doi.org/10.3724/sp.j.1010.2012.00011
2012-01-01
JOURNAL OF INFRARED AND MILLIMETER WAVES
Abstract:Back-illuminated 640 x 1 linear InGaAs detector arrays were fabricated on the In0.78Al0.22As/In0.78Ga0.22 As material of N-on-P configuration by the inductively coupled plasma (ICP) etching. The photoelectric characteristics of the detector were investigated. The results indicated that the cutoff-wavelength and peak-wavelength are 2.36 mu m and 1.92 lint, respectively, at room temperature. The average value of R(0)A is 16.0 Omega . cm(2) and the quantum efficiency of the peak wavelength reaches to 37.5%. Otherwise, the average peak detectivity of linear detector array reaches to 2.01 x 10(11) cm-Hz(1/2)/W, the response nonuniformity is about 8.77% and the defective pixel ratio is 0.6% for 1 ms of integrate time.
What problem does this paper attempt to address?