Ion Beam Technology: Figuring, Adding and Smoothing for High-precision Optics

Lin Zhou,Shengyi Li,Wenlin Liao,Hao Hu,Yifan Dai,Xuhui Xie

DOI: https://doi.org/10.1364/oft.2014.om4b.4

2014-01-01

Abstract:Besides conventional ion beam figuring process, ion beam adding has been proposed and applied in optical fabrication. Ion beam smoothing processes, especially on fuse silica and Zerodur are discussed, and ultra-smooth surfaces are achieved.

What problem does this paper attempt to address?

Ion beam figuring system for ultra-precise optics

Zheng Yuan,Yifan Dai,Xuhui Xie,Lin Zhou

DOI: https://doi.org/10.4028/www.scientific.net/KEM.516.19

2012-01-01

Key Engineering Materials

Abstract:Ion beam figuring (IBF) is a novel technology for Ultra-precise optics. Material is removed from optic surface in atomic or molecular form by physical sputtering. Due to non-contact between the tool and the work piece, the problems involved in the conventional process are avoided, such as edge-effect and tool-wear. The ion beam figuring process is of high determinacy and high efficiency. All these properties make ion beam figuring one of the promising methods for producing mirrors of high precision with nm-rms accuracy. In this article, a new ion beam figuring system which contains doubled vacuum chambers is set up. Optics can be exchanged by a transport vehicle shuttling between the two vacuum chambers without opening the primary vacuum chamber and waiting for the ion source to cool completely, which means the efficiency can be increased greatly. A high performance processing robot contains three linear axes and two angular axes of motion, providing 5-axis ion source positioning capability with high accuracy. The angle can be up to 50 degrees to figure very steep spherical and aspherical surfaces. Then, the beam removal function of Gaussian shape is obtained by an experimental method and it is extremely stable for a long time. Finally, two sample mirrors are figured by the ion beam figuring system: one is a fused silica flat mirror with a 100 mm diameter (90% effective aperture) and an ultra-precise flat mirror with a surface error of 0.89 nm rms, 14.7 nm PV is obtained; the other fused silica concave spherical mirror with a 100 mm aperture (90% effective aperture) and 420 mm radius of curvature is figured and a concave spherical mirror with 1 nm rms, 16.9 nm PV is obtained, which prove that the ion beam figuring system is favourable for the figuring process.
Ion Beam Figuring of High-Slope Surfaces Based on Figure Error Compensation Algorithm

Yifan Dai,Wenlin Liao,Lin Zhou,Shanyong Chen,Xuhui Xie

DOI: https://doi.org/10.1364/ao.49.006630

IF: 1.9

2010-01-01

Applied Optics

Abstract:In a deterministic figuring process, it is critical to guarantee high stability of the removal function as well as the accuracy of the dwell time solution, which directly influence the convergence of the figuring process. Hence, when figuring steep optics, the ion beam is required to keep a perpendicular incidence, and a five-axis figuring machine is typically utilized. In this paper, however, a method for high-precision figuring of high-slope optics is proposed with a linear three-axis machine, allowing for inclined beam incidence. First, the changing rule of the removal function and the normal removal rate with the incidence angle is analyzed according to the removal characteristics of ion beam figuring (IBF). Then, we propose to reduce the influence of varying removal function and projection distortion on the dwell time solution by means of figure error compensation. Consequently, the incident ion beam is allowed to keep parallel to the optical axis. Simulations and experiments are given to verify the removal analysis. Finally, a figuring experiment is conducted on a linear three-axis IBF machine, which proves the validity of the method for high-slope surfaces. It takes two iterations and about 9 min to successfully figure a fused silica sample, whose aperture is 21.3 mm and radius of curvature is 16 mm. The root-mean-square figure error of the convex surface is reduced from 13.13 to 5.86 nm.
Combined figuring technology for high-precision optical surfaces using a deterministic ion beam material adding and removal method

Wenlin Liao,Yifan Dai,Xuhui Xie,Lin Zhou

DOI: https://doi.org/10.1117/1.OE.52.1.010503

IF: 1.3

2013-01-01

Optical Engineering

Abstract:We propose a deterministic figuring method for fabricating high-precision optical surfaces by combining ion beam material adding (IBA) and material removal [ion beam figuring (IBF)] technology. The IBA is first utilized to improve the accuracy and quality of the optical surface by deterministically adding material to the local pits, and then the IBF is applied to further improve the surface accuracy through removing the local protuberances. Compared with current IBF technology, this combined method can realize the uniform convergence of the surface errors and simultaneously increase the convergence rate of the figuring process. (C) 2013 Society of Photo-Optical Instrumentation Engineers (SPIE). [DOI: 10.1117/1.OE.52.1.010503]
Morphology evolution of fused silica surface during ion beam figuring of high-slope optical components

Wenlin Liao,Yifan Dai,Xuhui Xie,Lin Zhou

DOI: https://doi.org/10.1364/AO.52.003719

2013-06-01

Abstract:Ultra-precision and ultra-smooth surfaces are vitally important for some high performance optical systems. Ion beam figuring (IBF) is a well-established, highly deterministic method for the final precision figuring of extremely high quality optical surfaces, whereas ion sputtering induced smoothing, or roughening for nanoscale surface morphology, strongly depends on the processing conditions. Usually, an improper machining method would arouse the production of nanoscale patterns leading to the coarsening of the optical surface. In this paper, the morphology evolution mechanism on a fused silica surface during IBF of high-slope optical components has been investigated by means of atomic force microscopy. Figuring experiments are implemented on two convex spherical surfaces by using different IBF methods. Both of their surface errors are rapidly reduced to 1.2 nm root mean square (RMS) after removing similar deep material, but their surfaces are characterized with obviously different nanoscale morphologies. The experimental results indicate that the ion incidence angle dominates the microscopic morphology during the IBF process. At near-normal incidence, fused silica achieves an ultra-smooth surface with an RMS roughness value R(q) down to 0.1 nm, whereas nanoscale ripple patterns are observed at a large incidence angle with an R(q) value increasing to more than 0.9 nm. Additionally, the difference of incidence angles on various machined areas would influence the uniformity of surface quality, resulting from the interplay between the smoothing and roughening effects induced by ion sputtering.
Structure Optimization and Fabricating Capability Analysis of an Ion-Beam Machine for a Subnanometer Optical Surface.

Mingjin Xu,Yifan Dai,Xuhui Xie,Lin Zhou,Wenlin Liao

DOI: https://doi.org/10.1364/ao.54.008055

IF: 1.9

2015-01-01

Applied Optics

Abstract:Ultraprecise and ultrasmooth surfaces become critical requirements for some high-performance optical systems. Ion-beam figuring (IBF) is a good and highly deterministic method for the final precision optical figuring. However, the uniform convergences of all spatial frequency surface errors are strongly dependent on the dynamic performance and ion-beam stability of the IBF machine. In this paper, only the dynamic performance is discussed, which is limited by the acceleration and velocity of the motion system. So we discuss these problems and their influences on figuring optical surfaces in detail. The structure optimization principle is based on the fabricating capability of ultraprecise surface errors in all spatial frequency ranges. With this requirement, the structure optimization of a quick-response platform is performed to improve its dynamic performance. Manufacturing experiments on a fused silica spherical concave surface (Φ135.7 mm, radius of curvature 340.5 mm) are accomplished, and the IBF machine can effectively correct the figure errors and improve the surface quality simultaneously. The IBF process realizes the uniform convergence of surface errors in all spatial frequency ranges, which is reduced down to 0.368 nm RMS, 0.204 nm RMS, and 0.087 nm RMS, respectively. The final results indicate that the performance of the new designed IBF machine meets the requirements well for the fabrication of a subnanometer optical surface.
Deterministic ion beam material adding technology for high-precision optical surfaces.

Wenlin Liao,Yifan Dai,Xuhui Xie,Lin Zhou

DOI: https://doi.org/10.1364/AO.52.001302

IF: 1.9

2013-01-01

Applied Optics

Abstract:Although ion beam figuring (IBF) provides a highly deterministic method for the precision figuring of optical components, several problems still need to be addressed, such as the limited correcting capability for mid-to-high spatial frequency surface errors and low machining efficiency for pit defects on surfaces. We propose a figuring method named deterministic ion beam material adding (IBA) technology to solve those problems in IBF. The current deterministic optical figuring mechanism, which is dedicated to removing local protuberances on optical surfaces, is enriched and developed by the IBA technology. Compared with IBF, this method can realize the uniform convergence of surface errors, where the particle transferring effect generated in the IBA process can effectively correct the mid-to-high spatial frequency errors. In addition, IBA can rapidly correct the pit defects on the surface and greatly improve the machining efficiency of the figuring process. The verification experiments are accomplished on our experimental installation to validate the feasibility of the IBA method. First, a fused silica sample with a rectangular pit defect is figured by using IBA. Through two iterations within only 47.5 min, this highly steep pit is effectively corrected, and the surface error is improved from the original 24.69 nm root mean square (RMS) to the final 3.68 nm RMS. Then another experiment is carried out to demonstrate the correcting capability of IBA for mid-to-high spatial frequency surface errors, and the final results indicate that the surface accuracy and surface quality can be simultaneously improved. (C) 2013 Optical Society of America
Nanopatterning of optical surfaces during low-energy ion beam sputtering

wenlin liao,yifan dai,xuhui xie

DOI: https://doi.org/10.1117/1.OE.53.6.065108

IF: 1.3

2014-01-01

Optical Engineering

Abstract:Ion beam figuring (IBF) provides a highly deterministic method for high-precision optical surface fabrication, whereas ion-induced microscopic morphology evolution would occur on surfaces. Consequently, the fabrication specification for surface smoothness must be seriously considered during the IBF process. In this work, low-energy ion nanopatterning of our frequently used optical material surfaces is investigated to discuss the manufacturability of an ultrasmooth surface. The research results indicate that ion beam sputtering (IBS) can directly smooth some amorphous or amorphizable material surfaces, such as fused silica, Si, and ULE (R) under appropriate processing conditions. However, for IBS of a Zerodur (R) surface, preferential sputtering together with curvature-dependent sputtering overcome ion-induced smoothing mechanisms, leading to the granular nanopatterns' formation and the coarsening of the surface. Furthermore, the material property difference at microscopic scales and the continuous impurity incorporation would affect the ion beam smoothing of optical surfaces. Overall, IBS can be used as a promising technique for ultrasmooth surface fabrication, which strongly depends on processing conditions and material characters. (c) 2014 Society of Photo-Optical Instrumentation Engineers (SPIE)
Obliquely incident ion beam figuring

lin zhou,yifan dai,xuhui xie,shengyi li

DOI: https://doi.org/10.1117/1.OE.54.10.105101

IF: 1.3

2015-01-01

Optical Engineering

Abstract:A new ion beam figuring (IBF) technique, obliquely incident IBF (OI-IBF), is proposed. In OI-IBF, the ion beam bombards the optical surface obliquely with an invariable incident angle instead of perpendicularly as in the normal IBF. Due to the higher removal rate in oblique incidence, the process time in OI-IBF can be significantly shortened. The removal rates at different incident angles were first tested, and then a test mirror was processed by OI-IBF. Comparison shows that in the OI-IBF technique with a 30 deg incident angle, the process time was reduced by 56.8%, while keeping the same figure correcting ability. The experimental results indicate that the OI-IBF technique is feasible and effective to improve the surface correction process efficiency. (C) The Authors. Published by SPIE under a Creative Commons Attribution 3.0 Unported License.
Ion beam machining error control and correction for small scale optics.

Xuhui Xie,Lin Zhou,Yifan Dai,Shengyi Li

DOI: https://doi.org/10.1364/AO.50.005221

IF: 1.9

2011-01-01

Applied Optics

Abstract:Ion beam figuring (IBF) technology for small scale optical components is discussed. Since the small removal function can be obtained in IBF, it makes computer-controlled optical surfacing technology possible to machine precision centimeter- or millimeter-scale optical components deterministically. Using a small ion beam to machine small optical components, there are some key problems, such as small ion beam positioning on the optical surface, material removal rate, ion beam scanning pitch control on the optical surface, and so on, that must be seriously considered. The main reasons for the problems are that it is more sensitive to the above problems than a big ion beam because of its small beam diameter and lower material ratio. In this paper, we discuss these problems and their influences in machining small optical components in detail. Based on the identification-compensation principle, an iterative machining compensation method is deduced for correcting the positioning error of an ion beam with the material removal rate estimated by a selected optimal scanning pitch. Experiments on phi 10 mm Zerodur planar and spherical samples are made, and the final surface errors are both smaller than lambda/100 measured by a Zygo GPI interferometer. (C) 2011 Optical Society of America
Ion beam figuring for X‐ray mirrors: history, state‐of‐the‐art and future prospects

Riley Shurvinton,Hongchang Wang,Paresh Pradhan,Ioana-Theodora Nistea,Simon Alcock,Murilo Bazan Da Silva,Arindam Majhi,Kawal Sawhney

DOI: https://doi.org/10.1107/s1600577524002935

IF: 2.557

2024-05-23

Journal of Synchrotron Radiation

Abstract:A review of the history of ion beam figuring and current developments is presented, with a focus on the production of high‐quality X‐ray optics.Synchrotron light sources require X‐ray optics with extremely demanding accuracy for the surface profile, with less than 100 nrad slope errors and sub‐nanometre height errors. Such errors are challenging to achieve for aspheres using traditional polishing methods. However, post‐polishing error correction can be performed using techniques such as ion beam figuring (IBF) to improve optics to the desired quality. This work presents a brief overview of the history of IBF, introduces some of the challenges for obtaining such demanding figure errors, and highlights the work done at several in‐house IBF facilities at synchrotron light sources worldwide to obtain state‐of‐the‐art optical quality.

optics,physics, applied,instruments & instrumentation
Ion beam figuring technology

DAI Yi-fan,ZHOU Lin,XIE Xu-hui,LIAO Wen-lin,SHEN Yong-xiang

2011-01-01

Journal of Applied Optics

Abstract:The ion beam figuring(IBF) technology is widely used for precision and deterministic process.This paper introduced the principles and characteristics of IBF,described its development status at home and abroad,summarized the research focus of IBF such as the technology to control the mid-high spatial frequency error,the algorithm to solve dwell time,and the processing technique.
Design of Ion Beam Figuring Machine for Optical Mirrors

Xuhui Xie,Yu Hao,Lin Zhou,Yifan Dai,Shengyi Li

DOI: https://doi.org/10.1117/1.oe.51.1.013401

2008-01-01

Acta Optica Sinica

Abstract:Ion beam Figuring (IBF) of optical mirror is a polishing process based on CCOS with the application of ion sputtering effects. The material removal mechanism is in the atom scale, which can enhance the precision of the target surface to tens of nanometers. Without contact, this process can also promote the subsurface quality. In this paper, the Ion Beam Figuring Machine (IBFM) is introduced，which realizes the relative motion between the target surface and the ion source. Firstly, we describe the design method, the machine configuration and principal technical parameters. With the configuration and motion ability described, we introduce different scanning modes for surfaces of different scales respectively. Secondly presented is the precision analysis method for IBFM. Based on the CCOS principle, the relation between the convergence rate and positioning errors are deduced. This relation describes the precision requirement of machining process. Finally, the postposition algorithm of IBFM is analyzed. According to coordinate transition and rotation, the general transfer model for different scanning modes is given.
Ion Beam Figuring System in NUDT

Lin Zhou,Xuhui Xie,Yifan Dai,Changjun Jiao,Shengyi Li

DOI: https://doi.org/10.1117/12.783658

2007-01-01

Abstract:Ion beam figuring (IBF) is an optical fabrication technique that provides highly deterministic process to correct surface figure error of previously polished surfaces by using a directed, inert and neutralized ion beam to physically sputter material from the optic surface. Recently, an ion beam figuring system KDIFS-500 has been designed and built in National University of Defense Technology (NUDT) of the P.R. China. KDIFS-500 is capable of processing workpiece up to Φ500mm. Line scanning process was discussed in detail for estimating the parameters of the beam removal function (BRF) in process. Experiments were conducted to demonstrate that the BRF increases gradually in process and by employing a stability control, the BRF can be kept stable in process. Finally, a Φ95 mm plano optical sample of CVD coated SiC substrate has been figured in two process iterations for demonstrating the correction capability of the KDIFS-500. Their figure convergence ratios reached 5.8 and 2.1 respectively. The actual figure residual errors were basically consistent with the predicted error. These consistencies indicated that the IBF processes on KDIFS-500 are predictable deterministic processes.
Ion Beam Figuring Strategy for Aluminum Optics with Minimal Extra Material Removal

Chaoliang Guan,Chunyang Du,Yifan Dai,Hao Hu

DOI: https://doi.org/10.1364/ao.452047

IF: 1.9

2022-01-01

Applied Optics

Abstract:With the application spectrum moving from infrared to visible light, aluminum optics with complex forms are difficult to fabricate by the majority of existing processing methods. Possessing the highest machining precision and low processing contamination, ion beam figuring (IBF) is a better method for fabrication of aluminum optics. However, the surface roughness deteriorates with the removal depth during IBF. In this study, the extra material removal during the IBF process is studied systematically. Extra material removal consists of two parts, determined by the convolution process and the limitation of the dynamic performance of machining tools. Extra material removal can be reduced by filtering out the surface residual error with a spatial frequency higher than the cut-off frequency and reducing the iterations of the machining process. Then, the executability of the dwell time matrix and the figuring ability of the removal function are analyzed. Adjusting the working parameters (volume removal rate) reduces the requirements for dynamic performance of machining tools. Finally, a minimal material removal processing strategy for aluminum optics based on power spectral density analysis and a spatial frequency filtering method is proposed. A simulation is conducted to verify the feasibility of the proposed strategy. With the same final precision (59.8 nm PV and 4.4 nm RMS), the maximum material removal decreases nearly 36 nm by applying the strategy, which reduces roughness nearly 10 nm. This study promotes the application of IBF in the field of aluminum optics fabrication as well as improves the machining precision of aluminum optics.
A One-Dimensional Ion Beam Figuring System for X-Ray Mirror Fabrication.

Mourad Idir,Lei Huang,Nathalie Bouet,Konstantine Kaznatcheev,Matthew Vescovi,Ken Lauer,Ray Conley,Kent Rennie,Jim Kahn,Richard Nethery,Lin Zhou

DOI: https://doi.org/10.1063/1.4934806

2015-01-01

Abstract:We report on the development of a one-dimensional Ion Beam Figuring (IBF) system for x-ray mirror polishing. Ion beam figuring provides a highly deterministic method for the final precision figuring of optical components with advantages over conventional methods. The system is based on a state of the art sputtering deposition system outfitted with a gridded radio frequency inductive coupled plasma ion beam source equipped with ion optics and dedicated slit developed specifically for this application. The production of an IBF system able to produce an elongated removal function rather than circular is presented in this paper, where we describe in detail the technical aspect and present the first obtained results.
Study on an Effective One-Dimensional Ion-Beam Figuring Method.

Tianyi Wang,Lei Huang,Matthew Vescovi,Dennis Kuhne,Kashmira Tayabaly,Nathalie Bouet,Mourad Idir

DOI: https://doi.org/10.1364/oe.27.015368

IF: 3.8

2019-01-01

Optics Express

Abstract:Ion-beam figuring (IBF) is a precise surface finishing technique used for the production of ultra-precision optical surfaces. In this study, we propose an effective one-dimensional IBF (1D-IBF) method approaching sub-nanometer root mean square (RMS) convergence for flat and spherical mirrors. Our process contains three key aspects. First, to minimize the misalignment of the coordinate systems between the metrology and the IBF hardware, a mirror holder is used to integrate both the sample mirror and the beam removal function (BRF) mirror. In this way, the coordinate relationship can be calculated using the measured BRF center. Second, we propose a novel constrained linear least-squares (CLLS) dwell time calculation algorithm combined with a coarse-to-fine scheme to ensure that the resultant nonnegative dwell time closely and smoothly duplicates the required removal amount. Third, considering the possible errors induced by the translation stage, we propose a dwell time slicing strategy to divide the dwell time into smaller time slices. Experiments using our approaches are performed on flat and spherical mirrors as demonstrations. Measurement results from the nano-accuracy surface profiler (NSP) show that the residual profile errors are reduced to sub-nanometer RMS for both types of mirrors while the surface roughness is not affected by the figuring process, demonstrating the effectiveness of the proposed 1D-IBF method for 1D high-precision optics fabrication.
Study on rapid convergence strategy of nano-precision optical surface by ion beam figuring

Yongbin Wang,Yifan Dai,Hao Hu,Chunyang Du,Jiahui Bao

DOI: https://doi.org/10.1016/j.optcom.2021.127614

IF: 2.4

2022-01-01

Optics Communications

Abstract:Ion beam figuring (IBF) provides a deterministic figuring method for fabricating ultra-high precision optical components such as lithographic objective lenses. But in the previous IBF process, the convergence of surface accuracy is often uncertain. Therefore, the iterative processing methods are mostly adopted. In the iterative process, the convergence ratio (the ratio of root mean square before and after figuring) of single figuring is relatively low. With the improvement of machining accuracy, the convergence ratio continues to decrease. The study analyzes the factors that limit the convergence ratio of single processing and the influence form and degree of each element on the convergence ratio. Furthermore, we present an IBF strategy with a high convergence ratio based on an optimized removal function. Based on this strategy, we complete the figuring experiment. The convergence ratio is much higher than the previous level. Compared with the surface of iterative figuring, the surface is simple and more favorable to figuring to sub-nanometer precision. The experimental results show that we can optimize the removal function to achieve rapid optical surface fabrication with nanometer precision.
Ion Beam Figuring for Rectangular Off-axis Aspheric Mirrors

LIAO Wen-lin,DAI Yi-fan,ZHOU Lin,WANG Jian-min,YUAN Zheng,XIE Xu-hui

DOI: https://doi.org/10.3969/j.issn.1001-2486.2011.01.021

2011-01-01

Abstract:A simple method of ion beam figuring was successfully employed for processing rectangular off-axis aspheric mirror.Based on the material removal mechanism,the normal removal characteristic was analyzed.Beam diameter,peak removal rate and volume removal rate are the three factors to evaluate the robustness of removal function with respect to little disturbance of incidence angle.According to the results of analyses and experiments,the method of processing rectangular off-axis aspheric mirror by ion beam figuring was appropriately simplified.To validate the feasibility of this method,an off-axis aspheric ellipsoidal mirror was processed in our IBF system.With three iterations of 200 minutes,the surface error was reduced from 0.294λ RMS to 0.05λ RMS and the total convergence ratio was 10.The experimental results indicate that IBF has inimitable material removal characteristics,can effectively improve surface precision and realize the rapid processing of ultra-precision rectangular off-axis aspheric mirror.
Microscopic morphology evolution during ion beam smoothing of Zerodur® surfaces.

Wenlin Liao,Yifan Dai,Xuhui Xie,Lin Zhou

DOI: https://doi.org/10.1364/OE.22.000377

IF: 3.8

2014-01-01

Optics Express

Abstract:Ion sputtering of Zerodur material often results in the formation of nanoscale microstructures on the surfaces, which seriously influences optical surface quality. In this paper, we describe the microscopic morphology evolution during ion sputtering of Zerodur surfaces through experimental researches and theoretical analysis, which shows that preferential sputtering together with curvature-dependent sputtering overcomes ion-induced smoothing mechanisms leading to granular nanopatterns formation in morphology and the coarsening of the surface. Consequently, we propose a new method for ion beam smoothing (IBS) of Zerodur optics assisted by deterministic ion beam material adding (IBA) technology. With this method, Zerodur optics with surface roughness down to 0.15nm root mean square (RMS) level is obtained through the experimental investigation, which demonstrates the feasibility of our proposed method. (C)2014 Optical Society of America
Study on the Relationship Between Motion Accuracy and Optical Surface Accuracy of Ion Beam Figuring Equipment

Yongbin Wang,Yifan Dai,Hao Hua,Zhe Zeng,Guangqi Zhou

DOI: https://doi.org/10.1117/12.2604878

2022-01-01

Abstract:Ion beam figuring has the advantages of non-contact, high certainty, and removal function’s long-term stability. It is the primary processing method of ultra-high precision optical elements such as lithography objective lens. In general, the IBF process does not require high motion precision of the moving mechanism. However, when the shape of the optical components changes from a plane to a curved surface and the RMS value of the surface accuracy is better than 0.3nm, the influence of the motion accuracy cannot be ignored. The paper focuses on the influence mechanism of IBF equipment’s motion accuracy on the shape of removal function, removal rate, and other essential parameters under the three-axis figuring mode of curved surface elements. We have discussed the sub-nanometer precision generation requirements of curved elements for removal function positioning accuracy and motion accuracy of polishing equipment. The feasibility of ion beam triaxial machining for the sub-nanometer precision generation of curved optical elements is demonstrated by analysis and calculation. The results show that under the condition of ensuring the micron motion accuracy, the three-axis ion beam figuring equipment can also process the curved surface’s surface to the ultra-high precision that the RMS value is better than 0.3nm. Still, it is difficult to achieve the machining goal only by improving the motion precision of the machine tool’s motion axis, so it is necessary to control the components’ initial profile error.

Ion Beam Technology: Figuring, Adding and Smoothing for High-precision Optics

Ion beam figuring system for ultra-precise optics

Ion Beam Figuring of High-Slope Surfaces Based on Figure Error Compensation Algorithm

Combined figuring technology for high-precision optical surfaces using a deterministic ion beam material adding and removal method

Morphology evolution of fused silica surface during ion beam figuring of high-slope optical components

Structure Optimization and Fabricating Capability Analysis of an Ion-Beam Machine for a Subnanometer Optical Surface.

Deterministic ion beam material adding technology for high-precision optical surfaces.

Nanopatterning of optical surfaces during low-energy ion beam sputtering

Obliquely incident ion beam figuring

Ion beam machining error control and correction for small scale optics.

Ion beam figuring for X‐ray mirrors: history, state‐of‐the‐art and future prospects

Ion beam figuring technology

Design of Ion Beam Figuring Machine for Optical Mirrors

Ion Beam Figuring System in NUDT

Ion Beam Figuring Strategy for Aluminum Optics with Minimal Extra Material Removal

A One-Dimensional Ion Beam Figuring System for X-Ray Mirror Fabrication.

Study on an Effective One-Dimensional Ion-Beam Figuring Method.

Study on rapid convergence strategy of nano-precision optical surface by ion beam figuring

Ion Beam Figuring for Rectangular Off-axis Aspheric Mirrors

Microscopic morphology evolution during ion beam smoothing of Zerodur® surfaces.

Study on the Relationship Between Motion Accuracy and Optical Surface Accuracy of Ion Beam Figuring Equipment