Porous Silicon Based Infrared Photonic-Sensor for High Sensitive Heavy Metal Ion Detection

Jian-Ren Lai,Jen-Kuei Wu,Minh-Hang Nguyen,Fan-Gang Tseng
DOI: https://doi.org/10.1109/transducers.2015.7181214
2015-01-01
Abstract:In this paper we report the development of an ultrasensitive photonic sensor based on nanoporous silicon (NPS) substrate for heavy metal ions detection in a FTIR reflection system. A one-dimensional photonic crystal with disturbed Bragg reflector (DBR) fabricated by successive electrochemical etchings (ECE) is employed to enhance the reflected IR signals [1] [2]. This well-defined NPS nanostructures will be red shifted due to the increase in the refractive index of the Fe 3+ ion solution (1 mM). The Fe 3+ with difference concentration due to difference spectrum shift, and the average sensitivity is 22.3cm −1 /mM corresponding to a detection limit of 10.8 ppm.
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