A Novel Porous Silicon-Based Multilayer Dielectric-Grating Structures for Diffraction-Based Sensing

Jiaqing Mo,Yajun Liu,Changwu Lv,Xiaoyi Lv,Zhenhong Jia
DOI: https://doi.org/10.1117/12.2071350
2014-01-01
Abstract:Porous silicon material and device has attracted more attention for use as biochemical optical sensors. In this paper, A novel porous silicon-based multilayer dielectric-grating structures by adding high-reflectivity porous silicon stacks between the substrate and grating was fabricated, and the porous silicon grating height was set to be about 200 nm, the grating period was 4 mu m, the air filling factor was 50%. A new better method of preparing this porous silicon-based multilayer dielectric-grating structures have also been employed.
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