Error-compensation Technology to Deal with Axis Misalignment of Multi MEMS Sensors

R Zhu,ZY Zhou
DOI: https://doi.org/10.1117/12.483149
2002-01-01
Abstract:As micro electro-mechanical system (MEMS) technology matures as an industry, the integration of standard integrated circuit and multi-MEMS-sensors will continue to increase. When assembling multi-sensors into a micro electro-mechanical system, usually exists axis-misalignment problem, which will inevitably induce large measurement error. This paper proposes an error compensation scheme based on optical alignment for solving this problem. A functional explanation is followed by a brief description of the optical layout. The computation including investigation and compensation to the axis-misalignment is covered later. Finally tests are conducted with a micro electro-mechanical azimuth-level detector to prove the validity of the method.
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