Generating terahertz signals in 65nm CMOS with negative-resistance resonator boosting and selective harmonic suppression

qun jane gu,zhiwei xu,hengyu jian,xiaojin xu,mauchung frank chang,wei liu,harold r fetterman
DOI: https://doi.org/10.1109/VLSIC.2010.5560335
2010-01-01
Abstract:Terahertz signals have been successfully generated in 65nm CMOS by: 1) stacking a negative-resistance resonator in parallel to the conventional resonant tank to boost the fundamental oscillation to 0.22 THz; and by 2) selectively suppressing the odd and 2(nd) harmonics to boost the 4(th) and 6(th) harmonics in the terahertz regime. Consequently, we have detected 4(th) and 6(th) harmonic signals through on-chip antenna radiation at 0.87 and 1.31 THz, respectively, by using a Michelson interferometer. To our best knowledge, this is the first time a signal beyond 1 THz is generated by silicon based semiconductor.
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