A THz-Wave Generator Based on MEMS Technology

Tao Ji Fang,Zhu Wei Ming,Cai Hong,Wu Jian,Xu Kun,Lin Jin Tong,Liu Ai Qun
DOI: https://doi.org/10.4028/www.scientific.net/amr.74.59
2009-01-01
Advanced Materials Research
Abstract:This paper reports a new kind Terahertz generator using tunable dual-wavelength generator based on MEMS technology, which are developed based on free-carrier effect (FCE) and thermo-optic effect (TOE) [1-3]. The approach provides a wide tuning range from 0 to 15 nm by adjusting the current of laser diodes and heating up common silicon Fabry-Perot (FP) external cavity. Compared to the conventional optical generation methods, this method has fast tuning speed (<1 ms), small size (2.2 mm 0.8 mm), high integration and quite stability performance.
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