Microgripper Using A Diamond Like Carbon/Metal Bilayer

j k luo,j h he,a j fiewitt,s m spearing,n a fleck,w i milne
DOI: https://doi.org/10.1109/ASDAM.2004.1441216
2004-01-01
Abstract:A novel normally\ closed microcage has been fabricated and characterized. This device was made from a highly compressively stressed diamond like carbon (DLC) and electroplated Ni bimorph structure. The large stress in the DLC causes the biomorph layer to curve. once it is released from the substrate. The radius of curvature is in the range of 18 similar to 50 mu m, and can be controlled by varying the DLC and the Ni thicknesses. The devices can be operated in a pulsed mode current with low operation temperature, and can be opened by similar to 60 mu m laterally with a power consumption of only similar to 16mW.
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