Closed-loop performance of double drive modes unimorph deformable mirror

ying liu,jianqiang ma,junjie chen,baoqing li,jiaru chu

DOI: https://doi.org/10.1364/AOPT.2013.OM3A.2

2013-01-01

Abstract:Abstract: Unimorph deformable mirrors are attractive in adaptive optics system due to their advantages of simplicity, compact, low cost and large stroke. This paper reports the close-loop performance of a double drive modes unimorph deformable mirror.

What problem does this paper attempt to address?

Characterization of close-loop performance of double drive modes unimorph deformable mirror

ying liu,jianqing ma,junjie chen,baoqing li,jiaru chu

DOI: https://doi.org/10.1117/12.2054109

2014-01-01

Abstract:Unimorph deformable mirrors are attractive in adaptive optics system due to their advantages of simplicity, compact, low cost and large stroke. In this paper, a double drive modes unimorph deformable mirror is discussed, which comprises a 100 mu m thick PZT layer and a 200 mu m thick silicon layer. This deformable mirror (DM) can achieve two different directions deformation of concave and convex driven by only positive voltage. The dual direction maximum defocus deformations are -14.3 mu m and 14.9 mu m. The close-loop performance of this DM is also tested in an experimental adaptive optics system based on Hartman-Shack wavefront sensor. In experiments, the DM is controlled by the steepest descent algorithm (SD) to corrected the aberrations in a close-loop manner. The ability of this DM of correction for the system aberration and reconstruction for the low order Zernike mode aberration is tested. The root mean square (rms) value of the system aberration after close-loop correction is about 28 nm. The reconstruction results for most low order Zernike mode aberrations have a relative error less than 10%.
Double drive modes unimorph deformable mirror with high actuator count for astronomical application

ying liu,jianqiang ma,junjie chen,baoqing li,jiaru chu

DOI: https://doi.org/10.1117/12.2055285

2014-01-01

Abstract:Unimorph deformable mirrors are attractive in adaptive optics system due to their advantages of simplicity, compact, low cost and large stroke. In this paper, a double drive modes unimorph deformable mirror is presented, which comprises a 200 mu m thick PZT layer and a 400 mu m thick silicon layer. This deformable has 214 inner actuators in the 50-mm active aperture, which are for the aberration correction and a outer ring actuator for generating an overall defocus bias. An analytical model based on the theory of plates and shells is built to predict the behavior of the deformable mirror. The stroke of the deformable mirror is tested in the experiments. In order to test the performance for aberration correction, the deformable mirror is used to correct the aberration from its imperfect initial mirror surface in the close-loop manner. The root-mean-square value of the mirror surface after the close-loop correction for ten iterations is about lambda/40, which indicates this deformable mirror has a good aberration correction performance. This DM has the potential to be used for astronomical adaptive optics.
Double drive modes unimorph deformable mirror for low-cost adaptive optics.

Jianqiang Ma,Ying Liu,Ting He,Baoqing Li,Jiaru Chu

DOI: https://doi.org/10.1364/AO.50.005647

IF: 1.9

2011-01-01

Applied Optics

Abstract:This paper reports the development and characterization of a low-cost thin unimorph deformable mirror (DM) driven by positive voltage. The developed DM consists of both an inner actuator array and an outer ring actuator, which works two drive modes: the inner actuator array is used for aberration correction, while the outer ring actuator is used to generate an overall defocus bias. An analytical model based on the theory of plates and shells is studied for predicting the behavior of the developed DM. Measurement results indicate that dual direction maximum defocus deformations of the developed DM are -14.3 and 14.9 mu m, respectively, and the resonant frequency is 1.8kHz. The root-mean-square deformation of the mirror surface after correction is better than lambda/20 for lambda = 633 nm. The replication of Zernike mode shapes up to the fifth order demonstrates that this developed DM is satisfactory for low-order aberration correction. (C) 2011 Optical Society of America
Double Drive Modes Unimorph Deformable Mirror For Femtosecond Laser Beam Wavefront Correction

Ying Liu,Junjie Chen,Jianqiang Ma,Baoqing Li,Jiaru Chu

DOI: https://doi.org/10.1117/12.2070595

2014-01-01

Abstract:Once a laser beam suffers from wavefront aberrations, the intensity of the focal spot degrades and the shape of the focus spot distorts. The same problem also exists in femtosecond laser fabrication system. The aberrations in the femtosecond laser fabrication system contain two main components: system aberrations and aberrations from the refractive index mismatch problem. Recently, adaptive optics (AO) has been used for laser beam aberrations correction to improve the light beam quality. In this paper, we introduce an adaptive optics system with double drive modes unimorph deformable mirror (DM) into the femtosecond laser fabrication system. In the experiments, the hill-climbing algorithm based on Zernike modes is used to control the DM to correct the aberrations in the close-loop manner. After correction for system aberrations and the refractive index mismatch aberrations, the shape and maximum intensity of the focal laser spot is much improved.
Research of an Adaptive Micro-Mirror Based on Micro-Opto-Electro-Mechanical- System

Saijun Lü,Dan Pei,Jian Bai,Xiyun Hou,Guoguang Yang

DOI: https://doi.org/10.3321/j.issn:0253-2239.2007.07.023

2007-01-01

Abstract:A novel adjustable focal-length optical adaptive micro-mirror based on bi-mental effect is presented. Compared with traditional deformable micro-mirror, micro-mirror fabricated by this method has the advantage of low driving voltage and large driving force. Besides, it is easy to be fabricated. Micro-machining processes such as oxygenation, photolithography, chemical etching and sputtering are experimented. A 4 × 4 bi-metal adjustable focal-length micro-mirror arrays have been completed. Each unit has an area of 3 mm × 3 mm with the thickness of silicon 60μm and aluminum film 150 nm. Deformable mirror area covers 79% of the total mirror area which is 100%. Dynamic performance of adjustable focal-length micro-mirror is tested using laser wave-front interferometer. Experiment results demonstrate that the micro-mirror can produce uni-directional continuous deformation with the maximum deformation of 15.8 and nonlinearity lag of 27%. It can work at 0-2.5 V with an adjustable focal length ranging from ∞ to 0.036 m.
Novel Unimorph Deformable Mirror for Ocular Adaptive Optics

Jianqiang Ma,Kai Chen,Junjie Chen,Jiaru Chu

DOI: https://doi.org/10.1117/12.2071455

2014-01-01

Abstract:This paper proposes a low-cost unimorph deformable mirror (DM) driven by positive voltages for ocular adaptive optics (AO). The DM consists of an inner actuators array and an outer ring actuator. The inner actuators array is used to correct aberrations, while the outer ring actuator is used to generate an overall defocus bias. The measurement results show that the maximum peak to valley defocus deformation is more than 14 mu m. The DM has a satisfactory correction capability for up to the fifth order Zernike mode aberrations. Furthermore, a sample of 200 ocular wavefronts was simulated using a statistical model developed by Thibos. After correction with the developed DM, most of the simulated eyes achieved the diffraction-limited performance. These experimental and simulation results indicate that this DM is satisfactory for ocular applications.
Close-loop Performance of a High Precision Deflectometry Controlled Deformable Mirror (DCDM) Unit for Wavefront Correction in Adaptive Optics System

Lei Huang,Chenlu Zhou,Wenchuan Zhao,Heejoo Choi,Logan Graves,Daewook Kim

DOI: https://doi.org/10.1016/j.optcom.2017.02.003

IF: 2.4

2017-01-01

Optics Communications

Abstract:We present a high precision deflectometry system (DS) controlled deformable mirror (DM) solution for optical system. Different from wavefront and non-wavefront system, the DS and the DM are set to be an individual integrated DCDM unit and can be installed in one base plate. In the DCDM unit, the DS can directly provide the influence functions and surface shape of the DM to the industrial computer in any adaptive optics system. As an integrated adaptive unit, the DCDM unit could be put into various optical systems to realize aberration compensation. In this paper, the configuration and principle of the DCDM unit is introduced first. Theoretical simulation on the close-loop performance of the DCDM unit is carried out. Finally, a verification experiment is proposed to verify the compensation capability of the DCDM unit.
Experimental evaluation of a positive-voltage-driven unimorph deformable mirror for astronomical applications

junjie chen,jianqiang ma,yuxin mao,ying liu,baoqing li,jiaru chu

DOI: https://doi.org/10.1117/1.OE.54.11.117103

IF: 1.3

2015-01-01

Optical Engineering

Abstract:A modified low-cost unimorph deformable mirror (DM) driven only by positive voltages for atmospheric turbulence compensation is presented. The 214 patterned inner actuators generate convex deformations for aberration correction, while one outer ring actuator generates an overall concave bias. To evaluate the aberration correction capability of the proposed DM, the iterative reconstruction of Zernike aberrations and correction were performed in an adaptive optics test system. The experimental results indicate that the fabricated DM has an excellent aberration correction capability, particularly matching the first 20 term Zernike aberrations with the normalized residual root-mean-square (RMS) error <5%. Furthermore, the random atmospheric turbulence aberrations were simulated based on Karhunen-Loeve coefficients and reconstructed using the fabricated DM. The simulative and experimental results show that the atmospheric turbulence aberrations can be steadily compensated with lambda/40 (lambda = 2.2 mu m) RMS residual error, indicating the prospect for atmospheric applications. (C) 2015 Society of Photo-Optical Instrumentation Engineers (SPIE)
Low-cost unimorph deformable mirror with high actuator count for astronomical adaptive optics

Jianqiang Ma,Ying Liu,Chen Xu,Hao Rong,Baoqing Li,Jiaru Chu

DOI: https://doi.org/10.1117/12.925522

2013-01-01

Abstract:A low-cost silicon unimorph deformable mirror (DM) with 214 actuators is presented. The finite element simulation indicates that the designed DM has an excellent correction performance for both low order and high order aberrations. The experimental actuator deflection is about 2 mu m at 100V. This DM has the potential to be used for astronomical adaptive optics.
New Unimorph Deformable Mirror For Laser Beam Shaping

Jianqiang Ma,Ying Liu,Xiaohui Xu,Baoqing Li,Jiaru Chu

DOI: https://doi.org/10.1117/12.973683

2012-01-01

Abstract:Unimorph DMs are attractive for laser beam shaping due to their advantages of simplicity, compact, low cost and large stroke. This paper reports a novel unimorph deformable mirror used for laser beam shaping. The developed DM consists of both an inner actuator array and an outer ring actuator. The inner actuator array is used for aberration correction, while the outer ring actuator is used to generate an overall defocus bias. A laser beam shaping experimental setup with a He-Ne laser was constructed. The correction capability of the DM is demonstrated by simulation and experiment.
Closed-loop Correction and Ocular Wavefronts Compensation of a 62-Element Silicon Unimorph Deformable Mirror

Jianqiang Ma,Kai Chen,Junjie Chen,Baoqing Li,Jiaru Chu

DOI: https://doi.org/10.3788/col201513.042201

2015-01-01

Abstract:Adaptive optics (AO) systems greatly improve the resolution of retinal imaging instruments by actively correcting ocular aberrations. In this Letter, closed-loop correction as well as ocular aberration compensation of a 62-element silicon unimorph deformable mirror (DM) driven by only positive voltage is performed. The experimental results show that the root-mean square (RMS) wavefront of the initial mirror surface is reduced to 0.011 μm in a closed-loop AO system. The DM reproduces Zernike shapes from the third to 35th mode accurately. The simulated compensation of 200 ocular wavefronts shows that the average RMS value after correction is reduced to 0.017 μm.
Design and Performance Testing of 200-Element Silicon Unimorph Deformable Mirror

MA Jian-qiang,LIU Ying,CHEN Jun-jie,LI Bao-qing,CHU Jia-ru

DOI: https://doi.org/10.3788/ope.20142208.2047

2014-01-01

Optics and Precision Engineering

Abstract:According to the requirements of astronomical telescopes for Deformable Mirrors(DMs),a silicon unimorph DM with 200 elements were designed and its characteristics were measured.Firstly,the structure model of unimorph DM was developed using finite element method.The influences of the electrode arrangement and the boundary support of the DM on correction capability were investigated.Then,three prototype DMs(annular simply support,annular clamped support,and hexagonal simply support)were fabricated.The influence functions of the fabricated DMs were measured using an interferometer.And the frequency response was measured using a laser Dopplar vibrometer.The simulation and experimental results indicate that the deflection of the actuator is more than1μm at 50 Vand the resonance frequency of the DM with clamped boundary is about 1kHz.The DMs have a well correction capability for the first 100 Zernike aberrations.These show that the developedDMs have potential applications for low-cost adaptive optics in astronomy.
Deformable mirrors based on piezoelectric unimorph microactuator array for adaptive optics correction

Jianqiang Ma,Ying Liu,Caipeng Chen,Baoqing Li,Jiaru Chu

DOI: https://doi.org/10.1016/j.optcom.2011.07.021

IF: 2.4

2011-01-01

Optics Communications

Abstract:This paper describes a piezoelectric deformable mirror (DM) for adaptive optics (AO) applications, with a 100μm thick silicon mirror driven by 61 unimorph microactuators. Measurement results show that the stroke of the DM is ~7.4μm at 100V, and the resonance frequency is at 18kHz. To demonstrate the correction capability of the DM, low-order Zernike modes up to 14th term were reproduced. Furthermore, a close-loop correction of laser beam in a 633nm helium-neon laser system was performed. After system aberrations being compensated, a focal spot approximate to Airy disk was achieved.
A 45-Element Continuous Facesheet Surface Micromachined Deformable Mirror for Optical Aberration Correction

Weimin Wang,Fangrong Hu,Qiang Wang,Chuankai Qiu,Zexiang Chen,Jun Yao

DOI: https://doi.org/10.1063/1.4867336

IF: 1.697

2014-01-01

AIP Advances

Abstract:A 45-element continuous facesheet surface micromachined deformable mirror (DM) is presented and is fabricated using the PolyMUMPs multi-user micro-electro-mechanical system processes. The effects of the structural parameters on the characteristics of the DM, such as its stroke, frequency and actuator coupling, are analyzed. In addition, the DM design has also been verified through experimental testing. This DM prototype has a surface figure of 0.5 μm and a fill factor of 95%. The DM can provide a 0.6 μm stroke with 5.9% actuator coupling. A static aberration correction based on this DM is also demonstrated, which acts as a reference for the potential adaptive optics (AO) applications of the device.
Piezoelectric Deformable Mirror Driven by Unimorph Actuator Arrays on Multi-Spatial Layers

Xiaoshuai Han,Jianqiang Ma,Kaiye Bao,Yuguo Cui,Jiaru Chu

DOI: https://doi.org/10.1364/oe.485078

IF: 3.8

2023-01-01

Optics Express

Abstract:In order to reduce the cost of the piezo actuator array deformable mirror (DM), a piezoelectric DM driven by unimorph actuator arrays on multi-spatial layers is proposed. The actuator density can be multiplied by increasing the spatial layers of the actuator arrays. A low-cost DM prototype with 19 unimorph actuators located on three spatial layers is developed. The unimorph actuator can generate a wavefront deformation up to 11 µm at an operating voltage of 50 V. The DM can reconstruct typical low-order Zernike polynomial shapes accurately. The mirror can be flattened to 0.058 µm in RMS. Furthermore, a focal spot close to Airy spot is obtained in the far field after the aberrations of the adaptive optics testing system being corrected.
Structure and Closed-Loop Control of A Novel Compact Deformable Mirror for Wavefront Correction in A High Power Laser System

Q. Xue,L. Huang,P. Yan,M. L. Gong,Y. T. Qiu,T. H. Li,Z. X. Feng,G. F. Jin

DOI: https://doi.org/10.1088/1612-2011/10/4/045301

IF: 1.2

2014-01-01

Laser Physics

Abstract:A new deformable mirror structure is presented, which mainly consists of a mirror, some transition layers, a preload structure and PZT actuators. Compared with the conventional deformable mirror, the new structure can smooth the surface shape and reduce residual errors, which are mainly affected by some structure parameters. The finite-element method is used to analyze the relationship between the structure parameters and the residual errors. The simulation results show that the structure parameters, including the diameter, thickness, and materials of transition layers and the stiffness of preload springs, can determine the residual errors. Based on the simulations, experimental comparisons between new and conventional deformable mirrors have verified that the new structure can effectively diminish residual errors. The new structure deformable mirror will play an important role in high power laser aberration correction.
Experiments on Quasi-Static and Dynamic Control of a PVDF Laminated Membrane-Like Mirror

Yifan Lu,Honghao Yue,Zongquan Deng,Hornsen Tzou

DOI: https://doi.org/10.1115/imece2016-66265

2017-01-01

Abstract:Due to their merits of low areal density, in-orbit deploying and low manufacturing cost properties, membrane-like deformable mirrors meet the ultra-lightweight and large aperture demand of space optical mirror systems well. Membrane-like mirrors has therefore become a hot spot in the field of space science research now. Surface of these in-orbit membrane-like structures are susceptible to external environment variation on account of their low stiffness and high flexibility properties. Once excited by external excitations, the membrane vibration endures and this would not only degrade its performance, but also lead to system or structural failures. So dynamic vibration control of the membrane-like mirror is indispensable. When the orbiting mirror passes from Earth’s shadow into sunlight, the surface temperature of the mirror changes and this will render membrane thermal distortion. Hence, quasi-static surface error adjustment of the mirror is also requisite. In this paper, a 0.2m diameter scaled-down Kapton membrane-like mirror is taken as the experiment subject. Polyvinylidene Fluoride (PVDF) patches are laminated on the non-reflective side of the mirror as in-plane actuators. High precision laser displacement sensors are used to measure the surface deviation of the mirror. A modal vibration control system based on the positive position feedback (PPF) algorithm and a quasi-static surface control system based on the proportional error feedback algorithm are established respectively. Several mirror control experiments are performed and the results indicate that the methods proposed could suppress the membrane vibration and alleviate the membrane thermal deformation effectively.
Research on Elastic Modes of Circular Deformable Mirror for Adaptive Optics and Active Optics Corrections.

Hairen Wang,Mingzhu Zhang,Yingxi Zuo,Xianzhong Zheng

DOI: https://doi.org/10.1364/oe.27.000404

IF: 3.8

2019-01-01

Optics Express

Abstract:In this paper, an elastic mode method of deformable mirror is proposed to decompose arbitrary wave-front errors of adaptive optics system. The elastic modes are derived with an analytical method of linear piezoelectricity based on a bimorph piezoelectric deformable mirror (BPDM), and the three-dimensional formulas of elastic modes are presented. Here a BPDM with an aperture of 165 mm as an example is numerically studied. Two different kinds of dynamic boundary conditions are considered, and the dependence of the elastic modes aberrations upon the orders and rotational symmetries is evaluated. Besides, a comparative study for elastic mode and Zernike polynomials is presented in the numerical analysis. The results have demonstrated that the elastic mode method can be not only used instead of Zernike polynomials, but also more effective to decompose arbitrary wave-front errors of a deformable mirror. Furthermore, finite element analysis method is used to validate the analytic method. The conclusions have shown reasonably consistent results between the two methods.
Experimental investigation of the deformable mirror with bidirectional thermal actuators

lei huang,xingkun ma,mali gong,qi bian

DOI: https://doi.org/10.1364/OE.23.017520

IF: 3.8

2015-01-01

Optics Express

Abstract:A deformable mirror with actuators of thermoelectric coolers (TECs) is introduced in this paper. Due to the bidirectional thermal actuation property of the TEC, both upward and downward surface control is available for the DM. The response functions of the actuators are investigated. A close-loop wavefront control experiment is performed too, where the defocus and the astigmatism were corrected. The results reveal that there is a promising prospect for the novel design to be used in corrections of static aberrations, such as in the Inertial Confinement Fusion (ICF). (C) 2015 Optical Society of America

Closed-loop performance of double drive modes unimorph deformable mirror

Characterization of close-loop performance of double drive modes unimorph deformable mirror

Double drive modes unimorph deformable mirror with high actuator count for astronomical application

Double drive modes unimorph deformable mirror for low-cost adaptive optics.

Double Drive Modes Unimorph Deformable Mirror For Femtosecond Laser Beam Wavefront Correction

Research of an Adaptive Micro-Mirror Based on Micro-Opto-Electro-Mechanical- System

Novel Unimorph Deformable Mirror for Ocular Adaptive Optics

Close-loop Performance of a High Precision Deflectometry Controlled Deformable Mirror (DCDM) Unit for Wavefront Correction in Adaptive Optics System

Experimental evaluation of a positive-voltage-driven unimorph deformable mirror for astronomical applications

Low-cost unimorph deformable mirror with high actuator count for astronomical adaptive optics

New Unimorph Deformable Mirror For Laser Beam Shaping

Closed-loop Correction and Ocular Wavefronts Compensation of a 62-Element Silicon Unimorph Deformable Mirror

Design and Performance Testing of 200-Element Silicon Unimorph Deformable Mirror

Deformable mirrors based on piezoelectric unimorph microactuator array for adaptive optics correction

A 45-Element Continuous Facesheet Surface Micromachined Deformable Mirror for Optical Aberration Correction

Piezoelectric Deformable Mirror Driven by Unimorph Actuator Arrays on Multi-Spatial Layers

Structure and Closed-Loop Control of A Novel Compact Deformable Mirror for Wavefront Correction in A High Power Laser System

Experiments on Quasi-Static and Dynamic Control of a PVDF Laminated Membrane-Like Mirror

Research on Elastic Modes of Circular Deformable Mirror for Adaptive Optics and Active Optics Corrections.

Experimental investigation of the deformable mirror with bidirectional thermal actuators