Multi-Photon Response Of Photon-Number-Resolving Superconducting Single Photon Detector

P. Gu,L. M. Zhao,C. Wan,L. B. Zhang,L. Kang,P. H. Wu
DOI: https://doi.org/10.1109/irmmw-thz.2015.7327929
2015-01-01
Abstract:A new photon-number-resolving superconducting single photon detector is fabricated and tested. To integrate the resistors connected to the nanowire, we used one step of electron-beam lithography and four subsequent photolithography steps. A micro cavity was introduced to the structure in order to gain relatively high quantum efficiency. The device fabricated could resolve 6 photons.
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