Integration of Carbon Nanotubes to Three-Dimensional C-Mems for Glucose Sensors

Shuang Xi,Tielin Shi,Dan Liu,Liangliang Xu,Hu Long,Wuxing Lai,Zirong Tang
DOI: https://doi.org/10.1016/j.sna.2013.04.004
2012-01-01
Abstract:A novel design and fabrication of glucose sensors based on carbon nanotubes (CNT) integrated with carbon micro-electromechanical system (C-MEMS) were reported in this work.Photolithography of CNT mixed SU-8 photoresist and the self-assembly of CNTs during the developing process were followed by the controlled pyrolysis process to form CNT integrated three-dimensional C-MEMS electrode array.Immobilization of enzyme onto these electrodes was carried out through co-deposition of glucose oxidase (GOx) and electrochemically polymerized polypyrrole (PPy) for glucose sensor.Sensing performance with different electrodeposition time and various glucose concentration were tested and compared.The results revealed that the C-MEMS/CNT based glucose sensor increased approximately two order of magnitude in sensitivity compared with blank C-MEMS one, demonstrating linear range for glucose concentrations from 1 mM to 15 mM with fast response.
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