Abstract:This paper presents a simple technique to fabricate new electrofluidic devices for the three-dimensional (3D) manipulation of microorganisms by hybrid subtractive and additive femtosecond (fs) laser microfabrication (fs laser-assisted wet etching of glass followed by water-assisted fs laser modification combined with electroless metal plating). The technique enables the formation of patterned metal electrodes in arbitrary regions in closed glass microfluidic channels, which can spatially and temporally control the direction of electric fields in 3D microfluidic environments. The fabricated electrofluidic devices were applied to nanoaquariums to demonstrate the 3D electro-orientation of Euglena gracilis (an elongated unicellular microorganism) in microfluidics with high controllability and reliability. In particular, swimming Euglena cells can be oriented along the z -direction (perpendicular to the device surface) using electrodes with square outlines formed at the top and bottom of the channel, which is quite useful for observing the motions of cells parallel to their swimming directions. Specifically, z -directional electric field control ensured efficient observation of manipulated cells on the front side (45 cells were captured in a minute in an imaging area of ~160×120 μm), resulting in a reduction of the average time required to capture the images of five Euglena cells swimming continuously along the z -direction by a factor of ~43 compared with the case of no electric field. In addition, the combination of the electrofluidic devices and dynamic imaging enabled observation of the flagella of Euglena cells, revealing that the swimming direction of each Euglena cell under the electric field application was determined by the initial body angle.

Electrical Manipulation of Biological Samples in Glass-Based Electrofluidics Fabricated by 3D Femtosecond Laser Processing

Femtosecond Laser Fabricated Electrofluidic Devices In Glass For 3d Manipulation Of Biological Samples

Controllable Alignment of Elongated Microorganisms in 3D Microspace Using Electrofluidic Devices Manufactured by Hybrid Femtosecond Laser Microfabrication

Nanoaquarium: Manipulation of Bio-Cells and Worms in Electrofluidics Fabricated by Hybrid Femtosecond Laser Processing

monolithically integrated into 3 D glass micro fl uidic chips using water-assisted femtosecond-laser fabrication for in situ control of electrotaxis †

Electrofluidics fabricated by space-selective metallization in glass microfluidic structures using femtosecond laser direct writing.

Vertical sidewall electrodes monolithically integrated into 3D glass microfluidic chips using water-assisted femtosecond-laser fabrication for in situ control of electrotaxis

Femtosecond Laser 3d Micromachining: A Powerful Tool for the Fabrication of Microfluidic, Optofluidic, and Electrofluidic Devices Based on Glass

Flexible metal patterning in glass microfluidic structures using femtosecond laser direct-write ablation followed by electroless plating

Laser Micro-Fabrication/Manipulation of Dielectric Materials

Monolithic integration of microelectric components and microfluidic structures in glass using femtosecond laser

Three-Dimensional Opto-Fluidic Devices Fabricated by Ultrashort Laser Pulses for High Throughput Single Cell Detection and Processing

Direct laser writing of 3D microfluidic structures in glass for lab-on-a-chip applications

Rapid Prototyping of Three-Dimensional Microfluidic Mixers in Glass by Femtosecond Laser Direct Writing

Ultrafast Fabrication of Micro-Channels and Graphite Patterns on Glass by Nanosecond Laser-Induced Plasma-Assisted Ablation (lipaa) for Electrofluidic Devices

High Efficiency Fabrication of Complex Microtube Arrays by Scanning Focused Femtosecond Laser Bessel Beam for Trapping/Releasing Biological Cells

Investigation on the Electrochemical Manipulation of Bio-Molecules in Glass Nanofluidic Channels

Femtosecond Laser Integration for Biophotonic Applications — A “magic Brush” in the Micro/nano-World

Femtosecond Laser Fabrication of Optofluidic Devices for Single Cell Manipulation

Laser Machined Fiber-Based Microprobe: Application in Microscale Electroporation

Femtosecond Laser Patterning of Biological Materials