Porous Silicon Nanowire Arrays With Excellent Antireflection Property

Fan Bai,Meicheng Li,Tiansheng Gu,Dandan Song,Hang Yu,Bing Jiang,Yingfeng Li
DOI: https://doi.org/10.1109/icmree.2013.6893717
2013-01-01
Abstract:Light trapping enhancement by porous silicon nanowire (SiNW) arrays were reported. Porous SiNW arrays were fabricated by an improved metal-assisted chemical etching method. A mechanism of Ag nanoparticles-induced silicon nanowires etching was proposed to explain nanopores formation. The obtained porous SiNW arrays exhibit excellent antireflection property of below 2% in the wavelength range of 300-1000nm, which can be applicable to solar cells.
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