Abstract:The advancement of laser lift‐off (LLO) technologies proposed in the field of semiconductors require enhanced comprehensive exploration and fundamental understanding of the complex mechanisms of laser‐matter interactions. The photothermal effects, "cold" processing, shock waves, and cavitation effects in LLO processes are focused on, and are dedicated to discussing their latest progress, sustainable applications, challenges, and new approaches in emerging electronics. Due to the advantages of non‐contact processing, high efficiency, high precision, and superior controllability, laser lift‐off (LLO) technologies exhibit excellent material applicability and process compatibility in the lift‐off of ultra‐thin electronic devices. This brings new opportunities for large‐scale manufacturing of emerging electronics that meet ultra‐thin, fragile, and poor high‐temperature resistance. However, this opportunity also comes with formidable challenges from the complex mechanisms of laser‐matter interactions, which hinder comprehensive exploration and fundamental understanding. By elaborating the laser‐material interactions, the photothermal effect, "cold" processing, shockwave effect, and cavitation effect in LLO process from multiple perspectives, this review is devoted to discussing the latest progress and sustainable application of LLO technologies in emerging electronics that are developing toward ultra‐thin, miniaturization, and integration, such as wafer level packaging, displays, energy harvesters, sensors, and memories. Finally, starting from the fundamental principles of material design, light field regulation, and intelligent control system, the challenges and new approaches faced by LLO technologies are explored and fully integrated with future innovative manufacturing concepts and device structures.

Laser Microprocessing in Microelectronics, Data Storage, and Photonics

Advancing Integrated Photonics and Microreactor Technologies with Ultrafast Laser Processing

Silicon Laser Micro-Processing of New Energy Source Materials

Microscopic Processing of Transparent Material with Nanosecond and Ultrafast Lasers

Laser-Assisted Nanoprocessing and Growth of Semiconductor Nanostructures

Short Pulse Laser Micro/nano Manufacturing: Fundamentals and Applications

Laser Micro-Fabrication/Manipulation of Dielectric Materials

Femtosecond Laser Micro/nano Processing: From Fundamental to Applications

Laser Synthesis and Microfabrication of Micro/Nanostructured Materials Toward Energy Conversion and Storage

Research Progress of Laser Micro Processing in Integrated Circuits Manufacturing

Femtosecond laser micromachining optical devices

Parallel Laser Micro/Nano‐Processing for Functional Device Fabrication

Laser-assisted Processing and Diagnostics of Functional Micro/Nanomaterials☆

Nanostructuring of Semiconductor Materials and Metallic Thin Films Using Femtosecond Laser and Scanning Probe Microscope

Laser Nanofabrication: Applications in Micro-Optics, Micro-Electronics, Micromachines, and Microfluidics

Femtosecond Laser Precision Engineering: From Micron, Submicron, to Nanoscale

Ultrafast Laser-Induced Processing of Materials: Fundamentals and Applications in Micromachining

355Nm DPSS UV Laser Micro-Processing for the Semiconductor and Electronics Industry

Laser Lift‐Off Technologies for Ultra‐Thin Emerging Electronics: Mechanisms, Applications, and Progress

Laser machining fundamentals: micro, nano, atomic and close-to-atomic scales

Nanoscale Laser Processing and Diagnostics