A new fiber-tip Fabry-Perot interferometer and its application for pressure measurement

guanjun wang,shen liu,jing zhao,changrui liao,xizhen xu,yiping wang

DOI: https://doi.org/10.1117/12.2184402

2015-01-01

Abstract:This paper reports a new silica fiber-tip Fabry-Perot interferometer with thin film and large surface area characteristic for high pressure and vacuum degree detection simultaneously, which is fabricated by etching a flat fiber tip into concave surface firstly, with subsequent arc jointing the concave fiber into a inline Fabry-Perot cavity, then drawing one surface of the F-P cavity into several micrometers scale by arc discharge and finally etching the surface into sub-micrometer scale integrally. As the silica fiber-tip Fabry-Perot interferometer film thickness could be tailored very thinly by HF acid solution, plus the surface area of thin film could be expanded during the chemical etching process, the variation of the bubble cavity length is very sensitive to the inner/outer pressure difference of the fiber-tip Fabry-Perot interferometer. Experimental result shows an high sensitivity of 780nm/MPa is feasible. Such configuration has the advantages of low-cost, ease of fabrication and compact size, which make it a promising candidate for pressure and vacuum measurement.