Study of TEM Micrographs of Thin-Film Cross-Section Replica Using Spectral Analysis

T MEI,L XU,JF TANG,PF GU
DOI: https://doi.org/10.1117/12.49494
1991-01-01
Abstract:The method of spectral analysis for studying the TEM micrograph of thin film replicas is presented. It has been proved that there are spectral losses in the TEM micrograph, which are concerned with the thickness of the replica. A TEM micrograph of the thin film cross section replica is studied with the aid of a computer.
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