An alternative approach to fabricate metal nanoring structures based on nanosphere lithography

zuzanna a lewicka,w william yu,vicki l colvin
DOI: https://doi.org/10.1117/12.891827
2011-01-01
Abstract:In this work we present a cost-effective fabrication method for metal ring-shaped nanostructure arrays based on nanosphere lithography. Periodic arrays of nanorings and nanocrescents were fabricated using a simple method that includes self-assembled monolayer formation, plasma treatment and deposition of metal. Lower cost and higher throughput were achieved due to the replacement of ion beam milling with reactive ion etching usually used in other methods. The dimensions of ring-like structures could be controlled by the size of the polystyrene spheres, the amount of deposited metal and the argon plasma etching time. These nanostructures can be made of essentially any metal and used as elements in optoelectronic nanodevices.
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