A Study of Metal Gates on HfO2 Using Si Nanowire Field Effect Transistors As Platform

Qiliang Li,Hao Zhu,Hui Yuan,Oleg Kirillov,Dimitris Ioannou,John Suehle,Curt Richter
DOI: https://doi.org/10.1149/05004.0267ecst
2012-01-01
Abstract:In this work, we present an experimental study on the effect of metal gates / high-k dielectrics stacks on threshold voltage and carrier mobility in nanowire field effect transistors. The difference between effective mobility and field effect mobility of nanowire FETs has been first demonstrated. The interface states and effective work functions of the engaged metals can also be extracted by studying various metal gates.
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