High-Temperature Piezoresponse Force Microscopy

B. Bhatia,J. Karthik,D. G. Cahill,L. W. Martin,W. P. King

DOI: https://doi.org/10.1063/1.3652771

IF: 4

2011-01-01

Applied Physics Letters

Abstract:We report high temperature piezoresponse force microscopy (PFM) on 100 nm thick PbZr0.2Ti0.8O3 films fabricated on a miniature heater stage. The microfabricated resistive heater allows local temperature control up to 1000 °C with minimal electrostatic interactions. The PFM measurements were used to collect piezoelectric hysteresis loops over the temperature range 25–400 °C. The piezoresponse increases with temperature and then decreases rapidly near 400 °C, which is indicative of ferroelectric-paraelectric phase transition.