Abstract:A series of amorphous FeCoZr composition gradient monolayer films with varying Zr contents was prepared on the Si(100) substrate using RF magnetron sputtering. The effects of the Zr sputtering power PZr on the static and dynamic magnetic properties of FeCoZr films were systematically investigated. The results demonstrate that the introduction of the Zr element as a composition gradient into FeCo films not only improves the soft magnetic properties of the films but also enhances their in-plane uniaxial magnetic anisotropy. In particular, the doping of Zr elements leads to the destruction of FeCo lattice, inducing a transformation of the films from polycrystalline to amorphous state, resulting in a significant decrease in coercivity (Hc reduced by 82%) and surface roughness (Ra reduced by 78%). In addition, as PZr increases from 30 to 70 W, the anisotropy fields Hk of the films increase from 128 to 340 Oe, and the resonance frequency fr increases from 4.24 to 5.23 GHz. By fitting the permeability spectrum using the LLG equation, it is found that FeCoZr composition gradient films exhibit a lower damping coefficient α of around 0.011–0.014, indicating the reduction of energy loss during magnetization dynamics. These findings highlight the potential applications of FeCoZr composition gradient films in the field of high-frequency microwaves.

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