Bottom-up Soft-Lithographic Fabrication of Three-Dimensional Multilayer Polymer Integrated Optical Microdevices

YY Huang,GT Paloczi,JKS Poon,A Yariv
DOI: https://doi.org/10.1063/1.1802380
IF: 4
2004-01-01
Applied Physics Letters
Abstract:We develop a method to efficiently fabricate three-dimensional multilayer polymer microchips for integrated optical applications. This method uses soft lithography to mold the core structures on top of the cladding, layers. By repeating the process, a three-dimensional multilayer integrated optical microdevice, which consists of several layers of individual planar optical devices, is fabricated. We demonstrate a dual-layer microring resonator optical filter device where the devices in the different layers show essentially identical transmission responses.
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