Abstract:We review recent advances in experimental methods for high spatial-resolution and high time-resolution thermometry, and the application of these and related methods for measurements of thermal transport in low-dimensional structures. Scanning thermal microscopy (SThM) achieves lateral resolutions of 50 nm and a measurement bandwidth of 100 kHz; SThM has been used to characterize differences in energy dissipation in single-wall and multi-wall carbon nanotubes. Picosecond thermoreflectance enables ultrahigh time-resolution in thermal diffusion experiments and characterization of heat flow across interfaces between materials; the thermal conductance G of interfaces between dissimilar materials spans a relatively small range, 20 <G <200 MW m(-2) K-1 near room temperature. Scanning thermoreflectance microscopy provides nanosecond time resolution and submicron lateral resolution needed for studies of heat transfer in microelectronic, opto-electronic and micromechanical systems. A fully-micromachined solid immersion lens has been demonstrated and achieves thermal-radiation imaging with lateral resolution at far below the diffraction limit, <2 mum. Microfabricated metal bridges using electrical resistance thermometry and joule heating give precise data for thermal conductivity of single crystal films, multilayer thin films, epitaxial superlattices, polycrystalline films, and interlayer dielectrics. The room temperature thermal conductivity of single crystal films of Si is strongly reduced for layer thickness below 100 nm. The through-thickness thermal conductivity of Si-Ge and GaAs-AlAs superlattices has recently been shown to be smaller than the conductivity of the corresponding alloy. The 3omega method has been recently extended to measurements of anisotropic conduction in polyimide and superlattices. Data for carbon nanotubes measured using micromachined and suspended heaters and thermometers indicate a conductivity near room temperature greater than diamond.

Limits to Fourier Theory in High Thermal Conductivity Single Crystals

Thermal Transport Across High-Pressure Semiconductor-Metal Transition in Si and Si0.991ge0.009

Anisotropic Failure of Fourier Theory in Time-Domain Thermoreflectance Experiments.

Frequency-Dependent Thermal Conductivity in Time Domain Thermoreflectance Analysis of Thin Films

Nonlocal Theory for Heat Transport at High Frequencies

Ballistic-phonon Heat Conduction at the Nanoscale As Revealed by Time-Resolved X-Ray Diffraction and Time-Domain Thermoreflectance

Thermoreflectance of Metal Transducers for Optical Pump-Probe Studies of Thermal Properties

Thermometry and Thermal Transport in Micro/Nanoscale Solid-State Devices and Structures

Frequency Dependence of the Thermal Conductivity of Semiconductor Alloys

Anisotropic and Inhomogeneous Thermal Conduction in Suspended Thin-Film Polycrystalline Diamond

Fast, Spatially Resolved Thermometry of Si and GaP Crystals Using Pump-Probe Two-Photon Absorption

Pump-probe measurements of the thermal conductivity tensor for materials lacking in-plane symmetry.

Thermal Conductivity As a Metric for the Crystalline Quality of SrTiO3 Epitaxial Layers

Thermal Visualization of Buried Interfaces Enabled by Ratio Signal and Steady-State Heating of Time-Domain Thermoreflectance

Thermal Conductivity of Epitaxial Layers of Dilute SiGe Alloys

Thermal Visualization of Buried Interfaces by Transient and Steady-State Responses of Time-Domain Thermoreflectance

Probing Anisotropic Heat Transport Using Time-Domain Thermoreflectance with Offset Laser Spots

Inorganic Crystals with Glass‐Like and Ultralow Thermal Conductivities†

Simultaneous Measurement of Thermal Conductivity, Heat Capacity, and Interfacial Thermal Conductance by Leveraging Negative Delay-Time Data in Time-Domain Thermoreflectance

Time-domain Thermoreflectance (TDTR) Data Analysis Using Phonon Hydrodynamic Model

Accurate prediction of thermal conductivity of Al2O3 at ultrahigh temperatures