Abstract:Purpose The purpose of this paper is to demonstrate the simplicity and versatility of micro‐cantilever based sensors and to present the influence of added mass and stress on the frequency response of the sensor in order to determine the most suitable sensing domain for a given application. Design/methodology/approach The frequency response of micro‐cantilevers depends not only on the applied mass and surface stress, but also on the mass position. An interpretation of the theoretical frequency results of the 1st and 2nd natural frequencies, for added mass, identifies a nodal point for the 2nd natural frequency which demonstrates mass invariance. Hence, at this nodal point, the frequency response remains constant regardless of mass and may be used for identifying purely induced surface stress influences on the micro‐cantilever's dynamic response. The Rayleigh‐Ritz energy method is used for the theoretical analysis. Theoretical results are compared with experimental results. Findings A graph of the 2nd natural frequency of micro‐cantilevers with added mass demonstrates the variability of the frequency with mass position on the micro‐cantilever. Of particular interest is the nodal point at which mass independence is revealed. This nodal point may be exploited to investigate purely stress‐related influences on the dynamic characteristics of micro‐cantilever sensors, thereby eliminating such effects as reactant evaporation from the micro‐cantilever sensor surface. In this regard, the nodal point of the 2nd natural frequency response is used to decouple mass‐stress influences. Research limitations/implications Owing to the micro‐scale size of the micro‐cantilevers, it may not be possible to apply mass or stress directly at the nodal point and to concentrate its influence there. Hence, a certain amount of influence due to mass‐stress coupling may remain in the frequency responses observed. Practical implications Silicon micro‐cantilevers can be easily shaped and sensitized to a variety of influences. These qualities are highly regarded for sensor applications. The work presented herein, contributes to the optimization of micro‐cantilever sensors' dynamic response as a function of mass and surface stress influences. The main criterion for choosing one or the other is based on the time for the surface reaction to take place between the sensing material and the target material. The results presented contribute to the performance optimization of micro‐cantilever based medical and bio‐sensors. Originality/value Surface stress effects are generally of much smaller magnitude than mass influences; hence, through an investigation of the stress effects at the nodal point of the 2nd natural frequency it is possible to eliminate the mass influence completely. At this position mass and stress influences are decoupled and the sensor response can be uniquely quantified as a function of the applied stress. This is important for bio‐medical and health monitoring applications in which changes to the applied mass or surface stress on a micro‐cantilever sensor, may be readily observed through changes to the natural frequency response of the micro‐cantilever.

Impact of Surface and Residual Stresses and Electro-/Magnetostatic Axial Loading on the Suspended Nanomechanical Based Mass Sensors: A Theoretical Study

Mass and Stiffness Deconvolution in Nanomechanical Resonators for Precise Mass Measurement and In Vivo Biosensing

Approaches To Increasing Surface Stress For Improving Signal-To-Noise Ratio Of Microcantilever Sensors

Surface Stress Induced by Interactions of Adsorbates and Its Effect on Deformation and Frequency of Microcantilever Sensors

Simple and versatile micro‐cantilever sensors

The effects of Casimir, van der Waals and electrostatic forces on the response of nanosensor beams

Mechanics of Surface Enhanced Microcantilever Sensors

Magnetoelastic Sensor Optimization for Improving Mass Monitoring

Vibration Analysis of Fluid-Conveying Nanotubes Embedded in an Elastic Medium Considering Surface Effects

Stress-Induced Variations in the Stiffness of Micro- and Nanocantilever Beams

Modeling Frequency Shifts in Small-Scale Beams with Multiple Eccentric Masses

Effect of Surface Stress on the Stiffness of Micro/nanocantilevers: Nanowire Elastic Modulus Measured by Nano-Scale Tensile and Vibrational Techniques

A Novel Frequency Stabilization Approach for Mass Detection in Nonlinear Mechanically Coupled Resonant Sensors

Towards a Hybrid Mass Sensing System by Combining a QCM Mass Sensor With a 3-DOF Mode Localized Coupled Resonator Stiffness Sensor

Sensitivity Dependence of Single Nanoparticle Mass Detection Using Mechanical Oscillations in Optical Microcavities

The effect of a distributed mass loading on the frequency response of a MEMS mesh resonator

Surface stress effects on the electrostatic pull-in instability of nanomechanical systems

Effects of Residual Stress on Static and Dynamic Characteristics of an Electrostatically Actuated Nanobeam

Effects of Surface Elasticity and Residual Surface Tension on the Natural Frequency of Microbeams

Effect of Surface Stresses on the Vibration and Buckling of Piezoelectric Nanowires

Static and Dynamic Mechanical Behaviors of Electrostatic MEMS Resonator with Surface Processing Error