A Study of Octupoles As Correctors

Z SHAO,V BECK,AV CREWE
DOI: https://doi.org/10.1063/1.341784
IF: 2.877
1988-01-01
Journal of Applied Physics
Abstract:In an electron microscope equipped with sextupole correctors the ultimate resolution is limited by the fifth-order spherical aberration of the optical system used to form the electron probe. We have examined the possibilities of using octupoles in order to correct this fifth-order spherical aberration. We find that for an electrostatic octupole, the fifth-order aberration is symmetric, while for a magnetic octupole the fifth-order aberration is asymmetric but it is possible to reduce this asymmetry by properly arranging the initial conditions. Based on these results, we propose a system which could be used to correct fifth-order aberration in a probe forming system equipped with a sextupole corrector.
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