Abstract:Optical waveguides fabricated in single crystals offer crucial passive/active optical components for photonic integrated circuits. Single crystals possess inherent advantages over their amorphous counterpart, such as lower optical losses in visible‐to‐mid‐infrared band, larger peak emission cross‐section, higher doping concentration. However, the writing of Type‐I positive refractive index modified waveguides in single crystals using femtosecond laser technology presents significant challenges. Herein, we introduce a novel femtosecond laser direct writing technique that combines slit‐shaping with an immersion oil objective to fabricate low‐loss Type‐I waveguides in single crystals. This approach allows for precise control of waveguide shape, size, mode‐field and refractive index distribution, with a spatial resolution as high as 700 nm and a high positive refractive index variation on the order of 10−2, introducing new degrees of freedom to design and fabricate passive/active optical waveguide devices. As a proof‐of‐concept, we successfully produced a 7 mm‐long circular‐shaped gain waveguide (∼10 μm in diameter) in an Er3+‐doped YAG single crystal, exhibiting a propagation loss as low as 0.23 dB/cm, a net gain of ∼3 dB and a polarization‐insensitive character. The newly‐developed technique is theoretically applicable to arbitrary single crystals, holding promising potential for various applications in integrated optics, optical communication, and photonic quantum circuits. This article is protected by copyright. All rights reserved

Femtosecond Laser-Written Double-Cladding Waveguides in Nd:Gdvo4 Crystal: Raman Analysis, Guidance, and Lasing

Annular waveguide lasers at 1064 nm in Nd:YAG crystal produced by femtosecond laser inscription

High-performance femtosecond-laser microfabricated lattice-like-cladding waveguides in Er 3+ and MgO co-doped LiNbO 3 crystals for multi-wavelength guidance and luminescence

Second-Harmonic Generation Using an A Axis Nd : Mgo : Linbo3 Single Crystal Fiber with Mg-Ion Indiffused Cladding

Nonlinear waveguides by femtosecond laser writing of lithium triborate crystals

Depressed-Cladding 3-D Waveguide Arrays Fabricated With Femtosecond Laser Pulses

1386 nm continuous wave output from laser diode end-pumped 1386 nm Nd:YVO4 laser

Laser action from a femtosecond laser written Yb: phosphate glass waveguide

3D Laser Writing of Low‐Loss Cross‐Section‐Variable Type‐I Optical Waveguide Passive/Active Integrated Devices in Single Crystals

Low-loss fs-laser-written surface waveguide lasers at >2 µm in monoclinic Tm3+:MgWO4

Cladded Optical Fiber Laser Made From A-Axis Nd : Mgo : Linbo3 Single Crystal Fiber With Mg-Ion Indiffusion

Femtosecond-laser-written Microstructured Waveguides in BK7 Glass

Buried Depressed-Cladding Waveguides Inscribed in Nd3+ and Yb3+ Doped CLNGG Laser Crystals by Picosecond-Laser Beam Writing

1550-Nm Light Amplification from Erbium-Doped Silica Glass Waveguide Written by Femtosecond Laser Pulses

Y-branch waveguide splitters inscribed in Nd:KGW crystal by femtosecond laser writing: realization and laser emission

Femtosecond-laser-inscribed cladding waveguides in KTiOPO4 crystal for second-harmonic generation and Y-branch splitters

Studies in Protein Metabolism of the Amphibian Embryo. II. Free Amino Acids

Femtosecond Laser-Written Waveguides in a Bismuth Germanate Single Crystal

Optical and fluorescent properties in Er, Yb:YAG double-line waveguide by femtosecond laser direct writing

Optical waveguides in Pr:LuAG crystal based on direct femtosecond laser writing

New channel guiding structures via femtosecond laser direct writing z-cut LiNbO 3 crystals