Acoustic Noise Energy Scavenger with Noise Reduction Effect

Shaohua Wu,Lidong Du,Haoyue Ping,Lijun Guo,Zhan Zhao,Deyi Kong,Zhen Fang
DOI: https://doi.org/10.4028/www.scientific.net/kem.609-610.1339
2014-01-01
Key Engineering Materials
Abstract:A kind of novel acoustic noise energy scavenger with additional function of noise reduction is introduced in this article. The device consists of energy harvesting membranes and silicon micro perforated panel (MPP) resonant structure. Both of them are all fabricated with silicon wafer in use of MEMS technology. The maximum output power of the energy scavenger is about 14.1μW/m2, the maximum open circuit voltage achieves 69.41mV, and the average noise absorption coefficient of the device is higher than 0.7 in the bandwidth of 1500Hz to 6000Hz. The energy collected by the device could be used for driving micro and nano electronic systems.
What problem does this paper attempt to address?