Hybrid Device for Noise Reduction with Micro-Nano Material and Silicon Micro-Perforated Panel Resonator

吴少华,赵湛,赵俊娟,孔德义,郭丽君,肖丽
DOI: https://doi.org/10.13494/j.npe.2013.042
2013-01-01
Nanotechnology and Precision Engineering
Abstract:A novel method was adopted for noise reduction,which added micro-nano ZnO structure into the micro-perforated panel(MPP) resonator.MEMS technology was employed to fabricate the well aligned micro perforators on the silicon panel,and the radius of the perforator was about 100 μm.The silicon panel and a rigid bracket constituted the MPP resonator.The micro-nano ZnO material synthesized by hydrothermal method was deposited onto the back panel in order to form a kind of hybrid device for noise reduction.Acoustic absorption experiments were carried out,and the results proved that the accuracy fabrication by MEMS technology was able to form MPP resonator with good noise absorption,and appropriate micro-nano ZnO structures on back panel enhanced the noise absorption of the device.The average absorption coefficient of the hybrid device increased by 2.54%,and reached 85.87% in the frequency band from 1 500 Hz to 6 000 Hz.The improvement was obvious especially in the frequency band from 1 500 Hz to 3 000 Hz.It can be concluded that the hybrid device with micro-nano ZnO structure and silicon MPP resonator had a better noise absorption capability.
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