Preparation of a BiFeO3/LaNiO3 Multiferroic Oxide Superlattice Structure by RF Magnetron Sputtering

Yen-Ting Liu,Shang-Jui Chiu,Hsin-Yi Lee,San-Yuan Chen
DOI: https://doi.org/10.1016/j.surfcoat.2011.08.030
2011-01-01
Abstract:Artificial superlattices consisting of multiferroic BiFeO3 (BFO) and conductive LaNiO3 (LNO) were grown epitaxially on a Nb-doped SrTiO3 (STO) (001) single-crystal substrate at temperatures in a range 560-810 degrees C with a RF magnetron sputtering system. The superlattice contained 30 periods of symmetric BFO/LNO bilayers with a thickness of 2 nm of each individual layer. Ferroelectric and conductive superlattice materials of this type can serve for an investigation of the strain dependence of ferroelectric properties of BFO layers in superlattice structures.Measurements of X-ray reflectivity and X-ray diffraction at high resolution were employed to characterize the microstructure of these films. The formation of a superlattice structure was confirmed by the appearance of Bragg peaks separated by Kiessig fringes in the X-ray reflectivity curve and a diffraction pattern. The clearly discernible main feature and satellite features on both sides of the substrate feature about the (002) STO Bragg peak indicate the high quality of the BFO/LNO artificial superlattice structure formed on a STO substrate at all deposition temperatures.X-ray measurements show that these superlattice films become subject to greater compressive strain in the in-plane direction, and possess increased crystalline quality when increasing the deposition temperature to 660 degrees C. The measurement of hysteresis loops shows that the largest remanent polarization (P-r) occurs at 660 degrees C. (C) 2011 Elsevier B.V. All rights reserved.
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