Fourier Coupled-Wave Diffraction Theory of Periodic Structures and Crystals

Xian-Rong Huang,Ru-Wen Peng,Marcelo G. Hoennicke,Thomas Gog
DOI: https://doi.org/10.1103/physreva.87.063828
IF: 2.971
2013-01-01
Physical Review A
Abstract:The dynamical theory of x-ray diffraction and the coupled-wave theory for modeling diffraction of light from periodic structures are two equivalent theories but with incompatibilities, as they were developed independently along two parallel directions in history. Here we reformulate the two theories into a universal Fourier coupled-wave diffraction theory (FCWDT), in which the fundamental coupled-wave equations for almost all practical diffraction geometry can always be written as a straightforward eigenvalue equation that is easily solvable by standard mathematical procedures. Since it removes most of the approximations and complexities in the two conventional theories, the FCWDT is almost rigorous yet simple and, in principle, can be used to compute scattering of electromagnetic waves from any kinds of periodic (nonmagnetic) structures, including x-ray diffraction from crystals and soft x-ray and light diffraction from periodic multilayers, gratings, and photonic crystals.
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