Simulation Methods of Piezoresistive Pressure Sensors in Order to Improve Consistency

Zhaohua Zhang,Tianling Ren,Ruirui Han,Bo Pang
DOI: https://doi.org/10.1142/s0217984913500115
2013-01-01
Modern Physics Letters B
Abstract:It is important to realize good consistency among different device units on a big wafer. The bad product consistency results from the processing deviation which is hard to control. A novel simulation method to control and reduce the influence of processing deviation on the sensitivity of a piezoresistive pressure sensor is provided in this paper. Based on finite element analysis (FEA) and mathematical integration, the performance of the pressure sensors is simulated. The pressure sensors are designed and fabricated according to the simulation results. The test results confirm that this simulation method can help to design the pressure sensor very precisely. From the simulation and test results, we find that properly enlarging the size of the square silicon membrane can improve the devices consistency.
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