High-speed Scanning Fiber-Optic Heterodyne Interferometer Using a Micro-Electro-mechanical System Mirror and an F-Theta Lens

Long Gao,Chunhui Wang,Yiqin Ji,Yanchao Li,Yang Qu
DOI: https://doi.org/10.1007/s10043-011-0085-0
IF: 1.2
2011-01-01
Optical Review
Abstract:This paper describes a novel fiber-coupled heterodyne interferometer using a micro-electro-mechanical system (MEMS) mirror and an f-theta lens. In this interferometer system, the cross-polarized laser beams operating at 2 μm with the frequency difference of 100 kHz are introduced by means of the two acousto-optic modulators (AOM). The sample with diameter of 300 mm is uniformly scanned by the 1 mm laser beam with the help of the combined optical scanning configuration, a MEMS mirror and an f-theta lens. The output intermediate signal from the two channels, reference channel and the measurement channel, are processed in the 12 bit analog-to-digital (A/D) process system. Details of our interferometer scheme are discussed.
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